Browsing by author "Sano, Ken-Ichi"
Now showing items 1-12 of 12
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Aging phenomena in the removal of nano-particles from Si wafers
Vereecke, Guy; Veltens, J.; Xu, Kaidong; Eitoku, A.; Sano, Ken-Ichi; Arnauts, Sophia; Kenis, Karine; Snow, J.; Vinckier, Chris; Mertens, Paul (2008) -
All wet photoresist strip by solvent aerosol spray
Wada, Masayuki; Sano, Ken-Ichi; Snow, Jim; Vos, Rita; Leunissen, Peter; Mertens, Paul; Eitoku, A (2008) -
Application of single-wafer wet cleaning prior to epitaxial SiGe process
Sano, Ken-Ichi; Wada, Masayuki; Leys, Frederik; Loo, Roger; Hikavyy, Andriy; Mertens, Paul; Snow, Jim; Izumi, A.; Miya, Katsuhiko; Eitoku, Atsuro (2009) -
Damage clustering and damage-size distributions after megasonic cleaning
De Marco, Cinzia; Wostyn, Kurt; Bearda, Twan; Sano, Ken-Ichi; Kenis, Karine; Janssens, Tom; Leunissen, Peter; Eitoku, Atsuro; Mertens, Paul (2007) -
Damage review on gate stack test structures after high-velocity aerosol cleaning
Wostyn, Kurt; Sano, Ken-Ichi; De Marco, Cinzia; Kenis, Karine; Van Den Heuvel, Dieter; Janssens, Tom; Bearda, Twan; Leunissen, Peter; Mertens, Paul; Eitoku, Atsuro (2007) -
Impact of galvanic corrosion on metal gate stacks
Wada, Masayuki; Garaud, Sylvain; Ferain, Isabelle; Collaert, Nadine; Sano, Ken-Ichi; Snow, Jim; Vos, Rita; Leunissen, Peter; Mertens, Paul; Eitoku, A (2008) -
Low temperature pre-epi treatment: critical parameters to control interface contamination
Loo, Roger; Hikavyy, Andriy; Leys, Frederik; Wada, Masayuki; Sano, Ken-Ichi; De Vos, Brecht; Pacco, Antoine; Bargallo Gonzalez, Mireia; Simoen, Eddy; Verheyen, Peter; Vanherle, Wendy; Caymax, Matty (2008) -
Low temperature pre-epi treatment: critical parameters to control interface contamination
Loo, Roger; Hikavyy, Andriy; Leys, Frederik; Wada, Masayuki; Sano, Ken-Ichi; De Vos, Brecht; Pacco, Antoine; Bargallo Gonzalez, Mireia; Simoen, Eddy; Verheyen, Peter; Vanherle, Wendy; Caymax, Matty (2008) -
Particle removal from micrometer-sized trenches using high-velocity-aerosol cleaning and comparison with megasonic tank cleaning
Wostyn, Kurt; Sano, Ken-Ichi; Eitoku, A.; Janssens, Tom; Bearda, Twan; Leunissen, Peter; Mertens, Paul (2007) -
Removal of nano-particles by mixed-fluid jet: evaluation of cleaning performance and comparison with megasonic
Vereecke, Guy; Veltens, T.; Eitoku, A.; Sano, Ken-Ichi; Doumen, Geert; Fyen, Wim; Wostyn, Kurt; Snow, J.; Mertens, Paul (2008) -
Single-wafer wet cleaning for a high particle removal efficiency on hydrophobic surface
Sano, Ken-Ichi; Izumi, A.; Eitoku, Atsuro; Snow, Jim; Kesters, Els; Mertens, Paul (2005) -
Spray systems for cleaning during semiconductor manufacturing
Wostyn, Kurt; Wada, Masayuki; Sano, Ken-Ichi; Andreas, Michael; Janssens, Tom; Bearda, Twan; Leunissen, Peter; Mertens, Paul (2008)