Browsing by author "Petersen, Dirch H."
Now showing items 1-9 of 9
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3 omega correction method for eliminating resistance measurement error due to Joule heating
Guralnik, Benny; Hansen, Ole; Henrichsen, Henrik H.; Beltran-Pitarch, Braulio; osterberg, Frederik W.; Shiv, Lior; Marangoni, Thomas A.; Stilling-Andersen, Andreas R.; Cagliani, Alberto; Hansen, Mikkel F.; Nielsen, Peter F.; Oprins, Herman; Vermeersch, Bjorn; Adelmann, Christoph; Dutta, Shibesh; Borup, Kasper A.; Mihiretie, Besira M.; Petersen, Dirch H. (2021) -
Advanced carrier depth profiling on Si and Ge with micro four-point probe
Clarysse, Trudo; Eyben, Pierre; Parmentier, Brigitte; Van Daele, Benny; Satta, Alessandra; Vandervorst, Wilfried; Lin, Rong; Petersen, Dirch H.; Folmer Nielsen, Peter (2008) -
Advanced characterization of carrier profiles in germanium using micro-machined contact probes
Clarysse, Trudo; Konttinen, Mikko; Parmentier, Brigitte; Moussa, Alain; Vandervorst, Wilfried; Impellizzeri, Giuliana; Napolitani, Enrico; Privitera, Vittorio; Nielsen, Peter F.; Petersen, Dirch H.; Hansen, Ole (2012) -
Atomic layer deposition of ruthenium with TiN interface for sub-10nm advanced interconnects beyond copper
Wen, Liang Gong; Roussel, Philippe; Varela Pedreira, Olalla; Briggs, Basoene; Groven, Benjamin; Dutta, Shibesh; Popovici, Mihaela Ioana; Heylen, Nancy; Ciofi, Ivan; Vanstreels, Kris; Osterberg, Frederik; Hansen, Ole; Petersen, Dirch H.; Opsomer, Karl; Detavernie, Christophe; Wilson, Chris; Van Elshocht, Sven; Croes, Kristof; Bommels, Jurgen; Tokei, Zsolt; Adelmann, Christoph (2016-09) -
Case studies of electrical characterisation of graphene by terahertz time-domain spectroscopy
Whelan, Patrick R.; Zhou, Binbin; Bezencenet, Odile; Shivayogimath, Abhay; Mishra, Neeraj; Shen, Qian; Jessen, Bjarke S.; Pasternak, Iwona; Mackenzie, David M. A.; Ji, Jie; Sun, Cunzhi; Seneor, Pierre; Dlubak, Bruno; Luo, Birong; Osterberg, Frederik W.; Huang, Deping; Shi, Haofei; Luo, Da; Wang, Meihui; Ruoff, Rodney S.; Conran, Ben R.; McAleese, Clifford; Huyghebaert, Cedric; Brems, Steven; Booth, Timothy J.; Napal, Ilargi; Strupinski, Wlodek; Petersen, Dirch H.; Forti, Stiven; Coletti, Camilla; Jouvray, Alexandre; Teo, Kenneth B. K.; Centeno, Alba; Zurutuza, Amaia; Legagneux, Pierre; Jepsen, Peter U.; Boggild, Peter (2021) -
Electrical characterization of InGaAs ultra-shallow junctions
Petersen, Dirch H.; Hansen, Ole; Boggild, Peter; Lin, Rong; Nielsen, Peter F.; Lin, Dennis; Adelmann, Christoph; Alian, AliReza; Merckling, Clement; Penaud, Julien; Brammertz, Guy; Goossens, Jozefien; Vandervorst, Wilfried; Clarysse, Trudo (2009) -
Electrical characterization of InGaAs ultra-shallow junctions
Petersen, Dirch H.; Hansen, Ole; Bĝggild, Peter; Lin, Rong; Nielsen, Peter F.; Lin, Dennis; Adelmann, Christoph; Alian, AliReza; Merckling, Clement; Penaud, Julien; Brammertz, Guy; Goossens, Jozefien; Vandervorst, Wilfried; Clarysse, Trudo (2010) -
Review of electrical characterization of ultra-shallow junctions with micro four-point probes
Petersen, Dirch H.; Hansen, Ole; Hansen, Torben M.; Boggild, Peter; Lin, Rong; Kjaer, Daniel; Nielsen, Peter F.; Clarysse, Trudo; Vandervorst, Wilfried; Rosseel, Erik; Bennett, Nick S.; Cowern, Nick E.B. (2009) -
Towards carrier profiling in nanometer-wide Si fins with micro four-point probe
Folkersma, Steven; Bogdanowicz, Janusz; Schulze, Andreas; Favia, Paola; Franquet, Alexis; Spampinato, Valentina; Petersen, Dirch H.; Hansen, Ole; Henrichsen, Henrik H.; Nielsen, Peter F.; Shiv, Lior; Vandervorst, Wilfried (2018)