Browsing by author "Li, M.F."
Now showing items 1-7 of 7
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High performance & CMOS integration friendly dual metal gate MOSFETs using TaN/Ru or TaN/W/Ru stacking multi-layers on HfLaO gate dielectric
Wang, X.P.; Li, M.F.; Yu, HongYu; Yang, J.J.; Loh, W.Y.; Zhu, C.X.; Du, A.Y.; Trigg, A.D.; Zhang, G.; Sik, H.W.; Ren, C.; Lim, Andy; Lee, Rinus; Yu, X.F.; Chen, J.D.; Chin, Albert; Yeo, Y.C.; Biesemans, Serge; Chua, T.C.; Nouri, F.; Lo, Patrick; Kwong, D.L. (2007) -
Improved electrical and reliability characteristics of HfN/HfO2 gated nMOSFET with 0.95 nm EOT fabricated using a gate-first process
Kang, JinFeng; Yu, HongYu; Ren, C.; Wang, X.P.; Li, M.F.; Chan, D.S.H.; Yeo, Y.C.; Sa, N.; Yang, H.; Liu, X.Y.; Han, R.Q.; Kwong, D.L. (2005-04) -
Modulation of the Ni FUSI workfunction by Yb doping: from midgap to n-type band-edge
Yu, HongYu; Chen, J.D.; Li, M.F.; Lee, S.J.; Kwong, D.L.; van Dal, Marc; Kittl, Jorge; Lauwers, Anne; Augendre, Emmanuel; Kubicek, Stefan; Zhao, Chao; Bender, Hugo; Brijs, Bert; Geenen, Luc; Benedetti, Alessandro; Absil, Philippe; Jurczak, Gosia; Biesemans, Serge (2005) -
Scalability and reliability of TaN/HfN/HfO2 gate stack fabricated by a high temperature process
Kang, JinFeng; Yu, HongYu; Ren, C.; Yang, H.; Sa, N.; Liu, X.Y.; Han, R.Q.; Li, M.F.; Chan, D.S.H.; Kwong, D.L. (2005) -
Schottky barrier height lowering by an increase of the substrate doping in PtSi Schottky barrier source/drain FETs
Lousberg, Gregory; Yu, HongYu; Froment, Benoit; Augendre, Emmanuel; De Keersgieter, An; Lauwers, Anne; Li, M.F.; Absil, Philippe; Jurczak, Gosia; Biesemans, Serge (2007) -
Widely tunable work function TaN/Ru stacking layer on HfLaO gate dielectric
Wang, X.P.; Li, M.F.; Yu, HongYu; Yang, J.J.; Chen, J.D.; Zhu, C.X.; Du, A.Y.; Loh, W.Y.; Biesemans, Serge; Chin, A.; Lo, G.Q.; Kwong, D.L. (2008) -
Work function tunability of refractory metal nitrides by lanthanum or aluminum doping for advanced CMOS devices
Wang, X.P.; Lim, A.E.J.; Yu, HongYu; Li, M.F.; Ren, C.; Loh, W.Y.; Zhu, C.X; Chin, A.; Trigg, A.D.; Yeo, Y.C.; Biesemans, Serge; Lo, G.Q.; Kwong, D.L. (2007)