Browsing by author "Verbist, Agnes"
Now showing items 21-40 of 42
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Mechanical characterisation of poly-SiGe layers for CMOS-MEMS integrated applications
Modlinski, Robert; Witvrouw, Ann; Verbist, Agnes; Puers, Bob; De Wolf, Ingrid (2010) -
MEMS 0-level packaging using thin film poly-SiGe caps
Rusu, Cristina; Verbist, Agnes; Parmentier, Brigitte; Witvrouw, Ann (2002-09) -
Metal and polySi (Ge) micromechanical devices for high frequency application
Pamidighantam, Sayanu; Jansen, Henri; Verbist, Agnes; Tilmans, Harrie; Baert, Kris; Puers, Bob (2000) -
Micromachined infrared pneumatic detector for gas sensor
Chévrier, Jean-Baptiste; Baert, Kris; Slater, Tim; Verbist, Agnes (1994) -
Micromachined infrared pneumatic detector for gas sensor
Chévrier, Jean-Baptiste; Baert, Kris; Slater, Tim; Verbist, Agnes (1995) -
Micromachined poly-SiGe bolometer arrays for infrared imaging and spectroscopy
Leonov, Vladimir; Perova, Natalia A.; De Moor, Piet; Du Bois, Bert; Goessens, Claus; Grietens, Bob; Verbist, Agnes; Vermeiren, Jan (2003) -
Multi-axial strain gage with octogonal shape
Slater, Tim; Van Gerwen, Peter; Verbist, Agnes; Beullens, Danny; Baert, Kris (1995) -
New low-stress PECVD Poly-SiGe layers for MEMS
Rusu, Cristina; Sedky, S.; Parmentier, Brigitte; Verbist, Agnes; Richard, Olivier; Brijs, Bert; Geenen, Luc; Witvrouw, Ann; Lärmer, F.; Fischer, F.; Kronmüller, S.; Leca, V.; Otter, B. (2003) -
Planarization of deep trenches
Rusu, Cristina; Klaasse, Gerard; Sedky, Sherif; Esch, Heleen; Parmentier, Brigitte; Verbist, Agnes; Witvrouw, Ann (2001) -
Poly SiGE microbolometer arrays
De Moor, Piet; Creten, Ybe; Du Bois, Bert; Garcia Cruz, M.; Goessens, Claus; Gromova, Maria; Leonov, Vladimir; Merken, Patrick; Perova, Natalia; Verbist, Agnes; Vermeiren, Jan; Van Hoof, Chris (2002) -
Poly-SiGe-based CMUT array with high acoustical pressure
Helin, Philippe; Czarnecki, Piotr; Verbist, Agnes; Bryce, George; Rottenberg, Xavier; Severi, Simone (2012) -
Poly-SiGe-based MEMS thin-film encapsulation
Guo, Bin; Wang, Bo; Wen, Lianggong; Helin, Philippe; Claes, Gert; De Coster, Jeroen; Du Bois, Bert; Verbist, Agnes; Van Hoof, Rita; Vereecke, Guy; Haspeslagh, Luc; Tilmans, Harrie; Decoutere, Stefaan; Osman, Haris; Puers, Bob; De Wolf, Ingrid; Tanaka, Shuji; Severi, Simone; Witvrouw, Ann (2012) -
Precision particle spectroscopy with microcalorimeters in magnetic fields
De Moor, Piet; Belmans, Wouter; Baert, Kris; Van Hoof, Chris; Verbist, Agnes; Oberstedt, A.; Vanneste, L. (1999) -
Precision particle spectroscopy with microcalorimeters in magnetic fields
De Moor, Piet; Belmans, Wouter; Baert, Kris; Van Hoof, Chris; Verbist, Agnes; Oberstedt, A.; Vanneste, L. (2000) -
Processing of MEMS gyroscopes on top of CMOS ICs
Witvrouw, Ann; Mehta, Anshu; Verbist, Agnes; Du Bois, Bert; Van Aerde, Steven; Ramos-Martos, J.; Ceballos, J.; Ragel, A.; Mora, J.M.; Lagos, M.A.; Arias, A.; Hinojosa, J.M.; Spengler, J.; Leinenbach, C.; Fuchs, T.; Kronmüller, S. (2005-02) -
SiGe MEMS technology: a platform technology enabling different demonstrators
Witvrouw, Ann; Van Hoof, Rita; Bryce, George; Du Bois, Bert; Verbist, Agnes; Severi, Simone; Haspeslagh, Luc; Osman, Haris; De Coster, Jeroen; Wen, Lianggong; Puers, Bob; Beernaert, Roel; De Smet, Herbert; Rudra, Sukumar; Van Thourhout, Dries (2010) -
SiGe MEMS technology: a platform technology enabling different demonstrators
Witvrouw, Ann; Van Hoof, Rita; Bryce, George; Du Bois, Bert; Verbist, Agnes; Severi, Simone; Haspeslagh, Luc; Osman, Haris; De Coster, Jeroen; Wen, Lianggong; Puers, Bob; Beernaert, Roel; De Smet, Herbert; Rudra, Sukumar; Van Thourhout, Dries (2010) -
SIGEM, low temperature deposition of poly-SiGe MEMs structures on standard CMOS circuits
Ramos-Martos, Juan; Ceballos-Caceres, Joaquin; Ragel-Morales, Antonio; Mora=-Gutierrez, Jose Miguel; Arias-Drake, Alberto; Lagos-Florido, Miguel-ANgel; Munoz-Hinojosa, Jose Maria; Mehta, Anshu; Verbist, Agnes; Du Bois, Bert; Kehr, Kersten; Leinenbach, Christina; Van Aerde, Steven; Spengler, Jorg; Witvrouw, Ann (2005) -
Small two-dimensional and linear arrays of polycrystalline SiGe microbolometers at IMEC-XenICs
Leonov, Vladimir; Creten, Ybe; De Moor, Piet; Du Bois, Bert; Goessens, Claus; Grietens, Bob; Merken, Patrick; Perova, Natalia A.; Ruttens, Gerlinde; Van Hoof, Chris; Verbist, Agnes; Vermeiren, Jan (2003) -
Stacked boron doped poly-crystalline silicon-germanium layers: an excellent MEMS structural layer
Claes, Gert; Van Barel, Greg; Van Hoof, Rita; Du Bois, Bert; Gromova, Maria; Verbist, Agnes; Van der Donck, Tom; Decoutere, Stefaan; Celis, Jean-Pierre; Witvrouw, Ann (2008)