Browsing by author "Sayan, Safak"
Now showing items 1-20 of 33
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BEOL compatible WS2 transistors fully fabricated in a 300 mm pilot line
Schram, Tom; Smets, Quentin; Heyne, Markus; Groven, Benjamin; Kunnen, Eddy; Thiam, Arame; Devriendt, Katia; Delabie, Annelies; Lin, Dennis; Chiappe, Daniele; Asselberghs, Inge; Lux, Marcel; Brus, Stephan; Huyghebaert, Cedric; Sayan, Safak; Juncker, Aurélie; Caymax, Matty; Radu, Iuliana (2017) -
Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracy
Bekaert, Joost; Gronheid, Roel; MKuppuswamy, Vijaya Kumar; Doise, Jan; Chan, BT; Vandenberghe, Geert; Sayan, Safak; Cao, Yi; Her, YoungJun (2014) -
Controlled sulfurization process for the synthesis of large area MoS2 films and MoS2-WS2 heterostructures
Chiappe, Daniele; Asselberghs, Inge; Sutar, Surajit; Iacovo, Serena; Afanasiev, Valeri; Stesmans, Andre; Balaji, Yashwanth; Peters, Lisanne; Heyne, Markus; Mannarino, Manuel; Vandervorst, Wilfried; Sayan, Safak; Huyghebaert, Cedric; Caymax, Matty; Heyns, Marc; De Gendt, Stefan; Radu, Iuliana; Thean, Aaron (2016) -
Defectivity study on dry development rinse process (DDRP)
Stokes, Harold; De Simone, Danilo; Thouroude, Yan; D'Urzo, Lucia; Sayan, Safak; Foubert, Philippe (2015) -
Design and benchmarking of hybrid CMOS-spin wave device circuits compared to 10nm CMOS
Zografos, Odysseas; Soree, Bart; Vaysset, Adrien; Cosemans, Stefan; Amaru, Luca; Gaillardon, Pierre-Emmanuel; De Micheli, Giovanni; Lauwereins, Rudy; Sayan, Safak; Raghavan, Praveen; Radu, Iuliana; Thean, Aaron (2015) -
Dielectric properties of spin-on metal oxides and their applications for 2D semiconductor devices
Sayan, Safak; Lin, Dennis; Asselberghs, Inge; Chiappe, Daniele; Sutar, Surajit; Radu, Iuliana; Thean, Aaron; Petermann, Claire; Hong, Sung Eun (2016) -
Directed self-assembly process integration – fin patterning
Sayan, Safak; Chan, BT; Marzook, Taisir; Vandenbroeck, Nadia; Altamirano Sanchez, Efrain; Gronheid, Roel; Singh, Arjun; Rincon Delgadillo, Paulina (2015) -
Directed self-assembly process integration – fin patterning approaches and challenges
Sayan, Safak; Chan, BT; Gronheid, Roel; Van Roey, Frieda; Kim, Min-Soo; Williamson, Lance; Nealey, Paul (2014) -
Dry development rinse process for ultimate resolution Improvement via pattern collapse mitigation
Sayan, Safak; Tao, Zheng; Chan, BT; De Simone, Danilo; Kuwahara, Yuhei; Nafus, Kathleen; Leeson, Michael J.; Gstrein, Florian; Singh, Arjun; Vandenberghe, Geert (2015) -
DSA as a complementary lithography technique for contact hole patterning
Gronheid, Roel; Singh, Arjun; Sayan, Safak; Vandenbroeck, Nadia; Chan, BT; Vandenberghe, Geert (2013) -
Enhancing etch contrast in DSA block copolymer films with sequential infiltration synthesis on 300mm Si substrates
Singh, Arjun; Sayan, Safak; El Otell, Ziad; Chan, BT; Gronheid, Roel (2014) -
Etch challenges for chemo-expitaxy Directed Self-Assembly (DSA) LiNe flow in Fin patterning
Chan, BT; Sayan, Safak; Marzook, Taisir; Altamirano Sanchez, Efrain; Gronheid, Roel; de Marneffe, Jean-Francois; Piumi, Daniele (2016) -
EUV extendibility via dry development rinse process
Sayan, Safak; Tao, Zheng; De Simone, Danilo; Vandenberghe, Geert (2016) -
Fabrication of magnetic tunnel junctions connected through a continuous free layer to enable spin logic devices
Wan, Danny; Manfrini, Mauricio; Vaysset, Adrien; Souriau, Laurent; Wouters, Lennaert; Thiam, Arame; Raymenants, Eline; Sayan, Safak; Jussot, Julien; Swerts, Johan; Couet, Sebastien; Rassoul, Nouredine; Babaei Gavan, Khashayar; Paredis, Kristof; Huyghebaert, Cedric; Ercken, Monique; Wilson, Chris; Mocuta, Dan; Radu, Iuliana (2018) -
Graphene wires as alternative interconnects
Asselberghs, Inge; Politou, Maria; Soree, Bart; Sayan, Safak; Lin, Dennis; Pashaei, Parham; Huyghebaert, Cedric; Raghavan, Praveen; Radu, Iuliana; Tokei, Zsolt (2015) -
High volume manufacturing compatible dry development rinse process (DDRP): patterning and defectivity performance for EUVL
Sayan, Safak; Vanelderen, Pieter; Hetel, Iulian; Chan, BT; Raghavan, Praveen; Blanco, Victor; Foubert, Philippe; D'Urzo, Lucia; De Simone, Danilo; Vandenberghe, Geert (2017) -
Impact of sequential infiltration synthesis on pattern fidelity of DSA lines
Singh, Arjun; Knaepen, Werner; Sayan, Safak; El Otell, Ziad; Chan, BT; Maes, Jan; Gronheid, Roel (2015) -
Implementation of DSA for electrical test vehicles at the 7 nm node
Gronheid, Roel; Doise, Jan; Bekaert, Joost; Chan, BT; Rincon Delgadillo, Paulina; Karageorgos, Ioannis; Ryckaert, Julien; Vandenberghe, Geert; Sayan, Safak; Lin, Guanyang (2015) -
Integration challenges of spin torque majority gatelogic
Wilson, Chris; Manfrini, Mauricio; Thiam, Arame; Souriau, Laurent; Babaei Gavan, Khashayar; Rassoul, Nouredine; Radisic, Dunja; Vaysset, Adrien; Trivkovic, Darko; Ercken, Monique; Swerts, Johan; Briggs, Basoene; Sayan, Safak; Radu, Iuliana; Mocuta, Dan (2016) -
Integration of interconnected magnetic tunnel junctions for spin torque majority gates
Wan, Danny; Manfrini, Mauricio; Souriau, Laurent; Sayan, Safak; Jussot, Julien; Swerts, Johan; Rassoul, Nouredine; Babaei Gavan, Khashayar; Wouters, Lennaert; Paredis, Kristof; Huyghebaert, Cedric; Vaysset, Adrien; Thiam, Arame; Ercken, Monique; Wilson, Chris; Mocuta, Dan; Radu, Iuliana (2017)