Browsing by author "Komori, Kana"
Now showing items 1-5 of 5
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Cleaning the high aspect ratio STI structures for advanced logic devices by implementation of a surface modification drying technique
Sebaai, Farid; Vereecke, Guy; Xu, XiuMei; Baudot, Sylvain; Amemiya, Fumihiro; Komori, Kana; Holsteyns, Frank (2018) -
Dry removal of a surface functionalization chemistry used for pattern collapse prevention
Vereecke, Guy; Komori, Kana; Nakano, Yuta; Sebaai, Farid; Xu, XiuMei; Oniki, Yusuke; Holsteyns, Frank (2018) -
Pre-Epi Clean of SiGe 20%: GeH4 and HCl vs H2-based in-situ cleaning
Wostyn, Kurt; Dhayalan, Sathish Kumar; Gencarelli, Federica; Masaoku, Toru; Iino, Hideaki; Yoshida, Yukifumi; Komori, Kana; Douhard, Bastien; Hikavyy, Andriy; Loo, Roger; Holsteyns, Frank (2018-05) -
SiGe vs. Si selective wet etchingfor Si gate-all-around
Komori, Kana; Rip, Jens; Yoshida, Yukifumi; Wostyn, Kurt; Sebaai, Farid; Liu, Wen Dar; Lee, Yi Chia; Sekiguchi, Ryo; Mertens, Hans; Hikavyy, Andriy; Holsteyns, Frank; Horiguchi, Naoto (2018) -
Study of SiGe cleaning
Komori, Kana; Wostyn, Kurt; Rondas, Dirk; Loyo Prado, Jana; Conard, Thierry; Loo, Roger; Ragnarsson, Lars-Ake; Horiguchi, Naoto; Holsteyns, Frank (2017)