Browsing by author "Kaneko, Shinya"
Now showing items 1-4 of 4
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Characterization and optimization of porogen based PECVD deposited extreme low-k materials as a function of UV-cure time
Verdonck, Patrick; De Roest, David; Kaneko, Shinya; Caluwaerts, Rudy; Tsuji, Naoto; Matsushita, Kiyohiro; Kemeling, Nathan; Travaly, Youssef; Sprey, Hessel; Schaekers, Marc; Beyer, Gerald (2007) -
Deposition and characterization of porogen based PECVD deposited and UV-cured extreme low-k materials
Verdonck, Patrick; De Roest, David; Kaneko, Shinya; Tsuji, Naoto; Matsushita, Kiyohiro; Travaly, Youssef; Sprey, Hessel; Schaekers, Marc; Beyer, Gerald (2007) -
Improved low-k dielectric properties using He/H2 plasma for resist removal
Urbanowicz, Adam; Shamiryan, Denis; Marsik, Premysl; Travaly, Youssef; Jonas, Alain; Verdonck, Patrick; Vanstreels, Kris; Ferchichi, Abdelkarim; De Roest, David; Sprey, Hessel; Matsushita, Kiyohiro; Kaneko, Shinya; Tsuji, Naoto; Luo, Shijian; Escorcia, Orlando; Berry, Ivan; Waldfried, Carlo; De Gendt, Stefan; Baklanov, Mikhaïl (2009) -
Spectroscopic ellipsometry and ellipsometric porosimetry studies of CVD low-k dielectric films
Marsik, Premysl; Verdonck, Patrick; Schneider, Dieter; De Roest, David; Kaneko, Shinya; Baklanov, Mikhaïl (2008)