Browsing by author "Pittevils, Joris"
Now showing items 1-4 of 4
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Aqueous photoresist and BARC wet strip in BEOL MHM patterning using UV and ozonated chemistry
Kesters, Els; Vereecke, Guy; Lux, Marcel; Pittevils, Joris; Struyf, Herbert (2011) -
Influence of photoresist and BARC selection on the efficiency of a post-etch wet strip in BEOL applications
Kesters, Els; Lux, Marcel; Pittevils, Joris; Baeyens, Jonas; Vereecke, Guy; Struyf, Herbert (2010) -
Modification of BARC layer by UV irradiation for post-etch wet strip applications in BEOL
Kesters, Els; Lux, Marcel; Pittevils, Joris; Vereecke, Guy (2010) -
Towards fully aqueous ozone wet strip of 193 nm photoresist stack using UV pre-treatments in low-k patterning applications
Kesters, Els; Le, Quoc Toan; Lux, Marcel; Pittevils, Joris; Vereecke, Guy; Struyf, Herbert; De Gendt, Stefan (2012)