Browsing by author "Verhaegen, Fabian"
Now showing items 1-4 of 4
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Double MZI micro-opto-mechanical pressure sensors for increased sensitivity and pressure range
Rochus, Veronique; Jansen, Roelof; Figeys, Bruno; Verhaegen, Fabian; Rosseel, Robrect; Merken, Patrick; Lenci, Silvia; Rottenberg, Xavier (2017) -
Micro-opto-mechanical pressure, sound, and ultrasound sensors in silicon-nitride photonic technology
Westerveld, Wouter; Figeys, Bruno; Gao, Hang; Huang, Chih-Hsien; Verhaegen, Fabian; Troia, Benedetto; Haouari, Rachid; Neutens, Pieter; O'Callaghan, John; Lenci, Silvia; Rottenberg, Xavier; Jansen, Roelof; Rochus, Veronique (2019) -
Modelling and design of micro-opto-mechanical pressure sensors in the presence of residual stresses
Rochus, Veronique; Jansen, Roelof; Haouari, Rachid; Figeys, Bruno; Mukund, Vignesh; Verhaegen, Fabian; Goyvaerts, Jeroen; Neutens, Pieter; O'Callaghan, John; Stassen, Andim; Lenci, Silvia; Rottenberg, Xavier (2017) -
Simulation and characterization of a high-sensitive micro-opto-mechanical microphone
Gao, Hang; Huang, Chih Hsien; Westerveld, Wouter; Haouari, Rachid; Troia, Benedetto; Verhaegen, Fabian; Jansen, Roelof; Figeys, Bruno; Rottenberg, Xavier; Rochus, Veronique (2018)