Browsing by author "Sun, Jianwu"
Now showing items 1-10 of 10
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Epitaxial Ge Growth in Ultra Narrow STI Patterned Si Wafer
Hikavyy, Andriy; Loo, Roger; Sun, Jianwu; Shimura, Yosuke; Bender, Hugo; Caymax, Matty; Thean, Aaron (2015) -
Ge epitaxial layer growth on Si in ultra narrow STI patterned structures
Loo, Roger; Hikavyy, Andriy; Sun, Jianwu; Bender, Hugo; Thean, Aaron (2015-05) -
Group IV Epi processing, evolution in CMOS from 90 to 10nm node
Loo, Roger; Dhayalan, Sathish Kumar; Hikavyy, Andriy; Ike, Shinichi; Rondas, Dirk; Rosseel, Erik; Shimura, Yosuke; Steenbergen, Johnny; Sun, Jianwu; Wang, Wei; Langer, Robert (2014) -
High resolution X-ray diffraction for in-line monitoring of Ge MOSFET devices
Ryan, Paul; Womington, Matthew; Sun, Jianwu; Hikavyy, Andriy; Shimura, Yosuke; Witters, Liesbeth; Tielens, Hilde; Schulze, Andreas; Loo, Roger (2015) -
Selective growth of strained Ge on relaxed SiGe in shallow trench isolation for p-MOS FINFET
Sun, Jianwu; Loo, Roger; Witters, Liesbeth; Hikavyy, Andriy; Shimura, Yosuke; Favia, Paola; Richard, Olivier; Bender, Hugo; Vandervorst, Wilfried; Collaert, Nadine; Thean, Aaron (2014) -
Strained Ge FINfet structures fabricated by selective epitaxial growth
Loo, Roger; Sun, Jianwu; Witters, Liesbeth; Hikavyy, Andriy; Vincent, Benjamin; Shimura, Yosuke; Favia, Paola; Richard, Olivier; Bender, Hugo; Vandervorst, Wilfried; Collaert, Nadine; Thean, Aaron (2014) -
Strained germanium quantum well p-FinFETs fabricated on 45nm fin pitch using replacement channel, replacement metal gate and germanide-free local interconnect
Witters, Liesbeth; Mitard, Jerome; Loo, Roger; Demuynck, Steven; Chew, Soon Aik; Schram, Tom; Tao, Zheng; Hikavyy, Andriy; Sun, Jianwu; Milenin, Alexey; Mertens, Hans; Vrancken, Christa; Favia, Paola; Schaekers, Marc; Bender, Hugo; Horiguchi, Naoto; Langer, Robert; Barla, Kathy; Mocuta, Dan; Collaert, Nadine; Thean, Aaron (2015) -
Ultimate nano-electronics: new material and device concepts for scaling nano-electronics beyond the Si roadmap
Collaert, Nadine; Alian, AliReza; Arimura, Hiroaki; Boccardi, Guillaume; Eneman, Geert; Franco, Jacopo; Ivanov, Tsvetan; Lin, Dennis; Loo, Roger; Merckling, Clement; Mitard, Jerome; Pourghaderi, Mohammad Ali; Rooyackers, Rita; Sioncke, Sonja; Sun, Jianwu; Vandooren, Anne; Veloso, Anabela; Verhulst, Anne; Waldron, Niamh; Witters, Liesbeth; Zhou, Daisy; Barla, Kathy; Thean, Aaron (2015) -
Use of X-ray techniques in the development of Ge MOSFET devices
Sun, Jianwu; Hikavyy, Andriy; Shimura, Yosuke; Witters, Liesbeth; Tielens, Hilde; Ryan, Paul; Loo, Roger (2014) -
X-ray microdiffraction measurements to support epitaxial growth studies of strained Ge-cap / relaxed SiGe on STI nano-scale patterned Si wafers
Loo, Roger; Shimura, Yosuke; Sun, Jianwu; Ike, Shinichi; Inuzuka, Yuuki; Nakatsuka, Osau; Zaima, Shigeaki; Imai, Yasuhiko; Kimura, Shigeru (2015)