Browsing by author "Ekinci, Yasin"
Now showing items 1-7 of 7
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Characterization of extreme ultraviolet resists with interference lithography
Solak, Harun H.; Ekinci, Yasin; Gronheid, Roel; Jouve, Amandine (2005) -
EUV resist contrast loss determination using interference lithography
Langner, Andreas; Solak, Harun H.; Auzelyte, Vaida; Ekinci, Yasin; David, Christian; Gobrecht, Jens; Gronheid, Roel; van Setten, Eelco; van Ingen Schenau, Koen; Feenstra, Kees (2009) -
Evaluation of resist performance for 22nm half-pitch and beyond using EUV interference lithography
Langner, Andreas; Ekinci, Yasin; Gronheid, Roel; Wang, Suping; van Setten, Eelco; van Ingen-Schenau, Koen; Feenstra, Kees; Mallmann, Joerg; Maas, Raymond (2010) -
Experimental evaluation of the impact of carbon nanotube EUV pellicles on reticle imaging
Mochi, Iacopo; Timmermans, Marina; Gallagher, Emily; Mariano, Marina; Pollentier, Ivan; Rajendran, Rajeev; Helfenstein, Patrick; Fernandez, Sara; Kazazis, Dimitrios; Ekinci, Yasin (2019) -
Measuring resist-induced contrast loss using EUV interference lithography
Langner, Andreas; Solak, Harun H.; Gronheid, Roel; van Setten, Eelco; Auzelyte, Vaida; Ekinci, Yasin; van Ingen Schenau, Koen; Feenstra, Kees (2010) -
Microstepper vs. interference EUV lithography: effects on resist profiles
Gronheid, Roel; Van Roey, Frieda; Goethals, Mieke; Solak, Harun H.; Ekinci, Yasin; van Ingen Schenau, Koen; Vannuffel, Cyril; Jouve, Amandine (2005) -
Photosensitized Chemically Amplified Resist (PSCAR) 2.0 for high-throughput and high-resolution EUV lithography: dual photosensitization of acid generation and quencher decomposition by flood exposure
Nagahara, Seiji; Carcasi, Michael; Shiraishi, Gosuke; Nakagawa, Hisashi; Dei, Satoshi; Shiozawa, Takahiro; Nafus, Kathleen; De Simone, Danilo; Vandenberghe, Geert; Stock, Hans-Jürgen; Küchler, Bernd; Hori, Masafumi; Naruoka, Takehiko; Nagai, Tomoki; Minekawa, Yukie; Iseki, Tomohiri; Kondo, Yoshihiro; Yoshihara, Kosuke; Kamei, Yuya; Tomono, Masaru; Shimada, Ryo; Biesemans, Serge; Nakashima, Hideo; Foubert, Philippe; Buitrago, Elizabeth; Vockenhuber, Michaela; Ekinci, Yasin; Oshima, Akihiro; Tagawa, Seiichi (2017)