Browsing by author "Dupont, Tania"

Dependence of etching rate on aspect ratio for high aspect TSV etching

Taichi, Nishio; Aoi, Nobuo; Sasago, Masaru; Kubota, Masafumi; Kostermans, Maarten; Brouri, Mohand; Dupont, Tania (2010)

Key factors to sustain the extension of a MHM-based integration scheme to medium and high porosity PECVD low-k materials

Travaly, Youssef; Van Aelst, Joke; Truffert, Vincent; Verdonck, Patrick; Dupont, Tania; Camerotto, Elisabeth; Richard, Olivier; Bender, Hugo; Croes, Kristof; De Roest, David; Vereecke, Guy; Claes, Martine; Le, Quoc Toan; Kesters, Els; Van Cauwenberghe, Marc; Beynet, Julien; Kaneko, S.; Struyf, Herbert; Baklanov, Mikhaïl; Matsushita, K.; Kobayashi, N.; Sprey, Hessel; Beyer, Gerald (2008)

Low damage etch approach of a new porous SiOC(H) Low-k dielectric

Van Aelst, Joke; Struyf, Herbert; Dupont, Tania; Hendrickx, Dirk; Travaly, Youssef; Boullart, Werner; Vanhaelemeersch, Serge (2005)

Microfluidics on 200mm quartz substrate using semiconductor fab dry etch process as an enabler for imaging applications in life sciences

Stassen, Andim; Fiorentino, Giuseppe; Jones, Ben; Stahl, Richard; Dupont, Tania; Vrancken, Evi; Humbert, Aurelie; Severi, Simone; Wood, Alex; Worster, Will; Riddell, Kevin; Ashraf, Huma; Thomas, Dave (2017)