Browsing by author "Ruzyllo, Jerzy"
Now showing items 1-6 of 6
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Advanced wet and dry cleaning coming together for next generation
Heyns, Marc; Mertens, Paul; Ruzyllo, Jerzy; Leeman, Marc (1999) -
Fluorine in thermal oxides from HF preoxidation surface treatments
Ruzyllo, Jerzy; Röhr, Erika; Baeyens, Martien; Mertens, Paul; Heyns, Marc (1999) -
Gas-phase surface proessing prior to 3.2nm gate oxidation
Ruzyllo, Jerzy; Röhr, Erika; Baeyens, Martien; Bearda, Twan; Mertens, Paul; Heyns, Marc (1998) -
Gas-phase surface proessing prior to 3.2nm gate oxidation
Ruzyllo, Jerzy; Röhr, Erika; Baeyens, Martien; Bearda, Twan; Mertens, Paul; Heyns, Marc (1999) -
Role of UV/chlorine exposure during dry surface conditioning before integrated epi deposition process
Ruzyllo, Jerzy; Röhr, Erika; Baeyens, Martien; Conard, Thierry; Mertens, Paul; Heyns, Marc (1998) -
Role of UV/chlorine exposure during dry surface conditioning before integrated epi deposition process
Ruzyllo, Jerzy; Röhr, Erika; Caymax, Matty; Baeyens, Martien; Conard, Thierry; Mertens, Paul; Heyns, Marc (1999)