Browsing by author "Saerens, Annelies"
Now showing items 1-8 of 8
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Effect of in situ boron doping on properties of silicon germanium films deposited by chemical vapor deposition at 400 degrees C
Sedky, Sherif; Witvrouw, Ann; Saerens, Annelies; Van Houtte, P.; Poortmans, Jef; Baert, Kris (2001) -
Effect of oxide and W-CMP on the material properties and electromigration behaviour of layered aluminium metallizations
Heyvaert, Ilse; Van Hove, Marleen; Witvrouw, Ann; Maex, Karen; Saerens, Annelies; Roussel, Philippe; Bender, Hugo (1999) -
Effect of oxide and W-CMP on the material properties and electromigration behaviour of layered aluminum metallisations
Heyvaert, Ilse; Van Hove, Marleen; Witvrouw, Ann; Maex, Karen; Saerens, Annelies; Roussel, Philippe; Bender, Hugo (2000) -
Grain growth, stress, and impurities in electroplated copper
Brongersma, Sywert; Kerr, Emma; Vervoort, Iwan; Saerens, Annelies; Maex, Karen (2002) -
Internal stresses in aluminium interconnects
Saerens, Annelies; Van Houtte, P.; Witvrouw, Ann (1999) -
Internal stresses in aluminium interconnects
Saerens, Annelies; Van Houtte, P.; Witvrouw, Ann (2000) -
Self-annealing characterization of electroplated copper films
Lagrange, Sébastien; Brongersma, Sywert; Judelewicz, Moshe; Saerens, Annelies; Vervoort, Iwan; Richard, Emmanuel; Palmans, Roger; Maex, Karen (1999) -
Self-annealing characterization of electroplated copper films
Lagrange, Sébastien; Brongersma, Sywert; Judelewicz, Moshe; Saerens, Annelies; Vervoort, Iwan; Richard, Emmanuel; Palmans, Roger; Maex, Karen (2000)