Browsing by author "Lamantia, Matthew"
Now showing items 1-5 of 5
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Comparison of lithographic performance between MoSi binary mask and MoSi attenuated PSM
Yamana, Mitsuharu; Lamantia, Matthew; Philipsen, Vicky; Wada, Shingo; Nagatomo, Tatsuya; Tonooka, Yoji (2009) -
Comparison of lithographic performance between MoSi binary mask and MoSi attenuated PSM
Yamana, Mitsuharu; Wada, Shingo; Nagatomo, Tatsuya; Tonooka, Yoji; Lamantia, Matthew; Philipsen, Vicky (2009) -
EUV mask defectivity: status and mitigation towards HVM
Jonckheere, Rik; Van Den Heuvel, Dieter; Lamantia, Matthew; Baudemprez, Bart; Hendrickx, Eric; Ronse, Kurt (2010) -
Investigation of EUV mask defectivity via full-field printing and inspection on wafer
Jonckheere, Rik; Van Den Heuvel, Dieter; Iwamoto, Fumio; Stepanenko, Nickolay; Myers, Alan; Lamantia, Matthew; Goethals, Mieke; Hendrickx, Eric; Ronse, Kurt (2009) -
Investigation of mask defect density in full field EUV lithography
Jonckheere, Rik; Van Den Heuvel, Dieter; Lamantia, Matthew; Hermans, Jan; Hendrickx, Eric; Goethals, Mieke; Vandenberghe, Geert; Ronse, Kurt (2009)