Browsing by author "Wu, Y."
Now showing items 1-5 of 5
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A theoretical and experimental study of damage-free BEOL cleaning with megasonic agitation
Lauerhaas, Jeff; Wu, Y.; Bran, M.; Fraser, B.; Brause, E.; Nicolosi, T. (2003) -
Bifacial Four-Terminal Perovskite/Silicon Tandem Solar Cells and Modules
Coletti, G.; Luxembourg, S. L.; Geerligs, L. J.; Rosca, V.; Burgers, A. R.; Wu, Y.; Okel, L.; Kloos, M.; Danzl, F. J. K.; Najafi, M.; Zhang, D.; Dogan, I.; Zardetto, V.; Di Giacomo, F.; Kroon, J.; Hupkes, J.; Burgess, C. H.; Creatore, M.; Andriessen, R.; Veenstra, S.; Aernouts, Tom (2020) -
Single wafer cleaning and drying: particle removal via a non-contact, non-damaging megasonic clean followed by a high performance "Rotagoni" dry
Lauerhaas, Jeff; Mertens, Paul; Fyen, Wim; Kenis, Karine; Meuris, Marc; Nicolosi, T.; Bran, M.; Fraser, B.; Franklin, C.; Wu, Y.; Heyns, Marc (2000) -
Sub 100nm particle removal with deionized water and a megasonic frequency of 835kHz
Lauerhaas, Jeff; Wu, Y.; Xu, Kaidong; Vereecke, Guy; Vos, Rita; Kenis, Karine; Mertens, Paul; Nicolosi, T.; Heyns, Marc (2002) -
Sub 100nm particle removal with deionized water and a megasonic frequency of ~835kHz
Lauerhaas, Jeff; Xu, Kaidong; Vereecke, Guy; Vos, Rita; Kenis, Karine; Mertens, Paul; Wu, Y.; Nicolosi, T.; Heyns, Marc (2001)