Browsing by author "Vandervorst, Alain"
Now showing items 1-8 of 8
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A metal hardmask approach for the contact patterning of a 0.186 μm² SRAM cell exposed with EUV lithography
de Marneffe, Jean-Francois; Goossens, Danny; Vandervorst, Alain; Demuynck, Steven; Goethals, Mieke; Hermans, Jan; Van Roey, Frieda; Baudemprez, Bart; Brus, Stephan; Vrancken, Christa (2008) -
Implementation of Ru based barriers in 50 nm half pitch single damascene Cu/SiCOH (k=2.5) structures
Carbonell, Laure; Volders, Henny; Heylen, Nancy; Kellens, Kristof; Tokei, Zsolt; Hendrickx, Dirk; Struyf, Herbert; Vandervorst, Alain; Claes, Martine; Lux, Marcel; Versluijs, Janko; Alaerts, Wilfried; Van Besien, Els; Deweerdt, Bruno; Vaes, Jan; Caluwaerts, Rudy; Cockburn, Andrew; Gravey, Virginie; Shah, Kavita; Al-Bayati, A.; Fu, X.; Lubben, D.; Sundarrajan, A.; Beyer, Gerald (2008) -
Lateral versus interdigitated diode design for 10 Gb/s Low-voltage low-loss silicon ring modulators
Pantouvaki, Marianna; Yu, Hui; Verheyen, Peter; Lepage, Guy; Bogaerts, Wim; Moelants, Myriam; Wouters, Johan M. D.; Radisic, Dunja; Vandervorst, Alain; Absil, Philippe; Van Campenhout, Joris (2012) -
Metal hard-mask based double patterning for 22nm and beyond
Struyf, Herbert; de Marneffe, Jean-Francois; Goossens, Danny; Hendrickx, Dirk; Huffman, Craig; Kunnen, Eddy; Lazzarino, Frederic; Milenin, Alexey; Shamiryan, Denis; Urbanowicz, Adam; Vandervorst, Alain; Boullart, Werner (2010) -
On the nature of weak spots in high-k layers submitted to anneals
Petry, Jasmine; Vandervorst, Alain; Richard, Olivier; Conard, Thierry; Dewolf, P.; Kaushik, Vidya; Delabie, Annelies; Van Elshocht, Sven (2004) -
Patterning of 25nm contact holes at 90nm pitch: combination of line/space double exposure immersion lithography and plasma-assisted shrink technology
de Marneffe, Jean-Francois; Lazzarino, Frederic; Goossens, Danny; Vandervorst, Alain; Richard, Olivier; Shamiryan, Denis; Xu, Kaidong; Truffert, Vincent; Boullart, Werner (2011) -
The small-gap technique: understanding an ion-shading method for plasma-surface interactions study
de Marneffe, Jean-Francois; Jarnac, Amelie; Conard, Thierry; Hendrickx, Dirk; Huffman, Craig; Kunnen, Eddy; Lazzarino, Frederic; Milenin, Alexey; Shamiryan, Denis; Struyf, Herbert; Vandervorst, Alain; Urbanowicz, Adam; Boullart, Werner (2010) -
Trends in the oxygen enhancement of the ionisation probabilities of elements sputtered from Si
Janssens, Tom; Huyghebaert, Cedric; Vandervorst, Alain (2002)