Browsing by author "Hoenicke, Philipp"
Now showing items 1-16 of 16
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A compact vibration reduced set-up for scanning nm-XRF and STXM
Lubeck, Janin; Seim, Christian; Dehlinger, Aurelie; Haidl, Andreas; Hoenicke, Philipp; Kayser, Yves; Unterumsberger, Rainer; Fleischmann, Claudia; Beckhoff, Burkhard (2018) -
Grazing incidence X-ray fluorescence analysis for the characterization of Ge1-xSnx thin films
Hoenicke, Philipp; Fleischmann, Claudia; Hermann, Peter; Beckhoff, Burkhard (2014) -
Mask absorber development to enable next-generation EUVL
Philipsen, Vicky; Luong, Vu; Opsomer, Karl; Souriau, Laurent; Rip, Jens; Detavernier, Christophe; Erdmann, Andreas; Evanschitzky, Peter; Laubis, Christian; Hoenicke, Philipp; Soltwisch, Victor; Hendrickx, Eric (2019) -
NEXAFS characterization of inorganic and organic materials for semiconductor application
Fleischmann, Claudia; Hoenicke, Philipp; Hermann, Peter; Mueller, Matthias; Beckhoff, Burkhard; Voroshazi, Eszter; Conard, Thierry; Vandervorst, Wilfried (2014) -
Pushing the boundaries of EUV scatterometry: reconstruction of complex nanostructures for next-generation transistor technology
Ciesielski, Richard; Lohr, Leonhard M.; Mertens, Hans; Charley, Anne-Laure; de Ruyter, Rudi; Bogdanowicz, Janusz; Hoenicke, Philipp; Abbasirad, Najmeh; Soltwisch, Victor (2023) -
Quantification of high-K nanolayers for semiconductor applications using synchrotron radiation and calibrated instrumentation
Mueller, Matthias; Hoenicke, Philipp; Detlefs, Blanka; Fleischmann, Claudia; Vandervorst, Wilfried; Beckhoff, Burkhard (2014) -
Reference-free, depth dependent characterization of nanoscale materials by combined X-ray reflectivity and grazing incidence X-ray fluorescence analysis
Hoenicke, Philipp; Mueller, Matthias; Detlefs, Blanka; Fleischmann, Claudia; Beckhoff, Burkhard (2014) -
Reference-free, depth-dependent characterization of nanoscaled materials using a combined grazing incidence X-ray fluorescence and X-ray reflectometry approach
Hoenicke, Philipp; Detlefs, Blanka; Fleischmann, Claudia; Vandervorst, Wilfried; Mueller, Matthias; Nolot, Emmanuel; Grampeix, Helen; Beckhoff, Burkhard (2015) -
Reference-free, in-depth characterization of nanoscaled systems with advanced grazing incidence X-ray fluorescence analysis
Hoenicke, Philipp; Mueller, Matthias; Detlefs, Blanka; Fleischmann, Claudia; Beckhoff, Burkhard (2014) -
Simultaneous Dimensional and Analytical Characterization of Ordered Nanostructures
Hoenicke, Philipp; Kayser, Yves; Nikolaev, Konstantin, V; Soltwisch, Victor; Scheerder, Jeroen; Fleischmann, Claudia; Siefke, Thomas; Andrle, Anna; Gwalt, Grzegorz; Siewert, Frank; Davis, Jeffrey; Huth, Martin; Veloso, Anabela; Loo, Roger; Skroblin, Dieter; Steinert, Michael; Undisz, Andreas; Rettenmayr, Markus; Beckhoff, Burkhard (2022) -
Small target compatible dimensional and analytical metrology for semiconductor nanostructures using X-ray fluorescence techniques
Hoenicke, Philipp; Kayser, Yves; Soltwisch, Victor; Waehlish, Andre; Wauschkuhn, Nils; Scheerder, Jeroen; Fleischmann, Claudia; Bogdanowicz, Janusz; Charley, Anne-Laure; Veloso, Anabela; Loo, Roger; Mertens, Hans; Hikavyy, Andriy; Siefke, Thomas; Andrle, Anna; Gwalt, Grzegorz; Siewert, Frank; Ciesielski, Richard; Beckhoff, Burkhard (2023) -
Soft x-ray spectroscopy reveals chemical information beneath the surface of organic photovoltaic devices
Fleischmann, Claudia; Hoenicke, Philipp; Mueller, Matthias; Beckhoff, Burkhard; Voroshazi, Eszter; Tait, Jeffrey; Conard, Thierry; Vandervorst, Wilfried (2014) -
Study of EUV reticle storage effects through exposure on EBL2 and NXE
Jonckheere, Rik; Aubert, Remko; Nair, Vineet Vijayakrishnan; Hendrickx, Eric; Wu, Chien-ching; de Rooij-Lohmann, Veronique; Eslstgeest, Dorus; lenseL, Henk; Soltwich, Victor; Hoenicke, Philipp; Kolbe, Michael; Scholze, Frank (2020) -
Thermal stability and relaxation mechanisms in compressively-strained Ge0.94Sn0.06 thin films grown by molecular beam epitaxy
Fleischmann, Claudia; Lieten, Ruben; Hermann, Peter; Hoenicke, Philipp; Beckhoff, Burkhard; Seidel, Felix; Douhard, Bastien; Richard, Olivier; Bender, Hugo; Shimura, Yosuke; Zaima, S; Uchida, Nori; Temst, Kristiaan; Vandervorst, Wilfried; Vantomme, Andre (2016) -
Thermally induced pit formation and Sn diffusion in strained GeSn films
Fleischmann, Claudia; Lieten, Ruben; Hoenicke, Philipp; Seidel, Felix; Zaima, Shimura; Conard, Thierry; Temst, Kristiaan; Vandervorst, Wilfried; Vantomme, Andre (2014) -
Time-frequency analysis assisted determination of ruthenium optical constants in the sub-EUV spectral range 8 nm-23.75 nm
Saadeh, Qais; Naujok, Philipp; Philipsen, Vicky; Hoenicke, Philipp; Laubis, Christian; Buchholz, Christian; Andrle, Anna; Stadelhoff, Christian; Mentzel, Heiko; Schoenstedt, Anja; Soltwisch, Victor; Scholze, Frank (2021)