Browsing by author "Verheijen, M."
Now showing items 1-5 of 5
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Assessing the performance of two and three dimensional dopant profiling techniques for sub-65nm technologies
Eyben, Pierre; Mody, Jay; Vemula, Sri Charan; Koelling, Sebastian; Verheyden, R.; Vandervorst, Wilfried; Raineri, V.; Giannazzo, F.; Verheijen, M.; Kim, D.H. (2007) -
Assessing the performance of two-dimensional dopant profiling techniques
Duhayon, Natasja; Eyben, Pierre; Fouchier, Marc; Clarysse, Trudo; Vandervorst, Wilfried; Alvarez, David; Schoemann, S.; Ciappa, M.; Stangoni, M.; Fichtner, W.; Formanek, P.; Raineri, V.; Giannazzo, F.; Goghero, D.; Rosenwaks, Y.; Shikler, R.; Saraf, S.; Sadewasser, S.; Barreau, N.; Glatzel, T.; Verheijen, M.; Mentink, S.A.M.; von Sprekelsen, M.; Maltezopoulos, T.; Wiesendanger, R.; Hellemans, L. (2003) -
Assessing the performance of two-dimensional dopant profiling techniques
Duhayon, Natasja; Eyben, Pierre; Fouchier, Marc; Clarysse, Trudo; Vandervorst, Wilfried; Álvarez, D.; Schoemann, S.; Ciappa, M.; Stangoni, M.; Fichtner, W.; Formanek, P.; Kittler, M.; Raineri, V.; Giannazzo, F.; Goghero, D.; Rosenwaks, Y.; Shikler, R.; Saraf, S.; Sadewasser, S.; Barreau, N.; Glatzel, T.; Verheijen, M.; Mentink, S.A.M.; von Sprekelsen, M.; Maltezopoulos, T.; Wiesendanger, R.; Hellemans, L. (2004) -
Island growth in the atomic layer deposition of zirconium oxide and aluminium oxide on hydrogen-terminated silicon: growth mode modelling and transmission electron microscopy
Puurunen, Riikka; Vandervorst, Wilfried; Besling, Wim F. A.; Richard, Olivier; Bender, Hugo; Conard, Thierry; Zhao, Chao; Delabie, Annelies; Caymax, Matty; De Gendt, Stefan; Heyns, Marc; Viitanen, M.M.; De Ridder, M.; Brongersma, Hidde; Tamminga, Y.; Dao, T.; de Win, T.; Verheijen, M.; Kaiser, M.; Tuominen, M. (2004) -
Pre-amorphization and co-implantation suitability for advanced PMOS devices integration
Surdeanu, Radu; Pawlak, Bartek; Lindsay, Richard; Van Dal, Mark; Doornbos, Gerben; Dachs, Charles; Ponomarev, Youri; Loo, Josine; Henson, Kirklen; Verheijen, M.; Kaiser, M.; Pagès, Xavier; Jurczak, Gosia; Stolk, Peter (2003)