Browsing by author "Pavelka, Tibor"
Now showing items 1-7 of 7
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Contactless mobility measurements of inversion charge carriers on silicon substrates with SiO2 and HfO2 gate dielectrics
Everaert, Jean-Luc; Rosseel, Erik; Dekoster, Johan; Pap, Aron; Maszaros, Albert; Kis-Szabo, Krisztian; Pavelka, Tibor (2010) -
Control of laser induced interface traps with in-line corona charge metrology
Everaert, Jean-Luc; Rosseel, Erik; Ortolland, Claude; Aoulaiche, Marc; Hoffmann, Thomas Y.; Pavelka, Tibor; Don, Eric (2008) -
Monitoring plasma nitridation of HfSiOx by corona charge measurements
Everaert, Jean-Luc; Shi, Xiaoping; Rothschild, Aude; Schaekers, Marc; Rosseel, Erik; Pavelka, Tibor; Don, Eric; Vanhaelemeersch, Serge (2007) -
Non-contact metrology for inversion charge carrier mobility by corona charge and photovoltage measurements on blank wafers with a gate dielectric
Everaert, Jean-Luc; Rosseel, Erik; Pap, Aron; Meszaros, Albert; Dekoster, Johan; Pavelka, Tibor (2010) -
Noncontact metrology for inversion charge carrier mobility by corona charge and photovoltage measurements on blank wafers with a gate dielectric
Everaert, Jean-Luc; Rosseel, Erik; Pap, Aron; Meszaros, Albert; Dekoster, Johan; Pavelka, Tibor (2011) -
Novel noncontact approach to characterization of mobility in inversion layers using corona charging of dielectric and SPV monitoring of sheet resistance
Everaert, Jean-Luc; Rosseel, Erik; Meszaros, Albert; Kis-Szabo, Krisztian; Tutto, P; Pap, Aron; Pavelka, Tibor; Wilson, Marshall; Findlay, Andrew; Edelman, P.; Lagowski, Jacek (2010) -
Use of corona charge photo-conductance decay (charge-PCD) for fast metal contamination monitoring of high temperature processes
Huyghebaert, Cedric; Bearda, Twan; Rosseel, Erik; Everaert, Jean-Luc; Don, Eric; Pavelka, Tibor (2008)