Browsing by author "Novikova, N."
Now showing items 1-4 of 4
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F atoms interaction with nanoporous OSG low-k materials
Rakhimova, T.; Rakhimov, A.; Zyryanov, S.; Lopaev, D.; Mankelevich, Y.; Proshina, O.; Novikova, N.; Kurchikov, K.; Baklanov, Mikhaïl (2014) -
Interaction of F atoms with SiCOH ultra low-k films. Part I: Fluorination and damage
Rakhimova, T.; Lopaev, D.; Mankelevich, Y.; Rakhimov, A.; Zyryanov, S.; Kurchikov, K.; Novikova, N.; Baklanov, Mikhaïl (2015) -
Low-k OSG damage and etching by F atoms at lowered temperatures
Zyryanov, S.; Kurchikov, D.; Lopaev, D.; Mankelevich, Y.; Palov, A.; Rakhimova, T.; Voronina, E.; Novikova, N.; Baklanov, Mikhaïl (2015) -
Modification of OSG based low-k films under EUV and VUV exposure
Rakhimova, T.; Rakhimov, A.; Mankelevich, Y.; Lopaev, D.; Kovalev, A.; Vasil'eva, A.; Proshina, O.; Braginsky, O.; Zyryanov, S.; Kurchikov, K.; Novikova, N.; Baklanov, Mikhaïl (2013)