Browsing by author "Polli, Marco"
Now showing items 1-7 of 7
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Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flow
Pathangi Sriraman, Hari; Chan, BT; Bayana, Hareen; Vandenbroeck, Nadia; Van Den Heuvel, Dieter; Van Look, Lieve; Rincon Delgadillo, Paulina; Cao, Yi; Kim, JiHoon; Lin, Guanyang; Parnell, Doni; Nafus, Kathleen; Harukawa, Ryota; Chikashi, Ito; Polli, Marco; D'Urzo, Lucia; Gronheid, Roel; Nealey, Paul (2015) -
Evaluation of post ion-implantation resist strip with the background signal of a light scattering tool
Halder, Sandip; Vos, Rita; Wada, Masayuki; Tsvetanova, Diana; Claes, Martine; Mertens, Paul; Radovanovic, Sanda; Dighe, Prasanna; Amann, Christophe; Simpson, Gavin; Polli, Marco (2010) -
GaN-on-Si process defect detection and analysis for HB-LEDs and power devices
Halder, Sandip; Stiers, Karen; Kandaswamy, Prem Kumar; Rosmeulen, Maarten; Carbonell, Laure; Saripalli, Yoga; Osman, Haris; Rosseel, Erik; Mani, Antonio; Hu, Qiona; Vedula, Srinivas; Polli, Marco (2013) -
Inspection challenges for triple patterning at sub-14 nm nodes with broadband plasma inspection platforms
Halder, Sandip; Truffert, Vincent; Van Den Heuvel, Dieter; Leray, Philippe; Cheng, Shaunee; McIntyre, Greg; Sah, Kaushik; Brown, Jim; Parisi, Paolo; Polli, Marco (2015) -
Overlay metrology for double patterning processes
Leray, Philippe; Cheng, Shaunee; Laidler, David; Kandel, Daniel; Adel, Mike; Dinu, Berta; Polli, Marco; Vasconi, Mauri; Salski, Bartlomiej (2009) -
Progress on background signal analysis of bare wafer inspection systems based on light scattering for III/V epitaxial growth monitoring
Halder, Sandip; Mols, Yves; Van Den Heuvel, Dieter; Van Puymbroeck, Jan; Caymax, Matty; Vancoille, Eric; Nieuborg, Nancy; Bast, Gerhard; Simpson, Gavin; Peikert, Milko; Polli, Marco; Ulea, Neli; Seong, Ho Yoo (2014) -
Using the low frequency component of the background signal for SiGe and Ge growth monitoring
Halder, Sandip; Schulze, Andreas; Leray, Philippe; Caymax, Matty; Bast, Gerhard; Simpson, Gavin; Ulea, Neli; Polli, Marco (2015)