Browsing by author "Proshina, O.V."
Now showing items 1-4 of 4
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1-D model of OSG low-k films modification by EUV/VUV emission
Rakhimova, T.V.; Rakhimov, A.T.; Mankelevich, Y.A.; Lopaev, D.V.; Ziryanov, S.M.; Kovalev, A.S.; Vasil'eva, A.N.; Proshina, O.V.; Braginsky, O.V.; Kurchikov, K.; Baklanov, Mikhaïl (2013) -
Interaction of F atoms with SiCOH ultra low-k films. Part II: Etching
Rakhimova, T.; Lopaev, D.; Mankelevich, Y.; Kurchikov, K.; Zyryanov, S.; Palov, A.P.; Proshina, O.V.; Maslakov, K.; Baklanov, Mikhaïl (2015) -
Recombination of O and H atoms with low-k SiOCH films pretreated in He plasma
Baklanov, Mikhaïl; Braginsky, O.V.; Kovalev, A.S.; Lopaev, D.V.; Mankelevich, Y.A.; Rakhimova, T.V.; Malykhin, E.M.; Proshina, O.V.; Rakhimov, A.T.; Vasilieva, A.N.; Voloshin, D.G.; Zyryanov, S.M. (2009) -
The effect of He plasma treatment on properties of organosilicate glass low-k films
Braginsky, O.V.; Kovalev, A.S.; Lopaev, D.V.; Malykhin, E.M.; Mankelevich, Y.A.; Proshina, O.V.; Rakhimova, T.V.; Rakhimov, A.T.; Voloshin, D.G.; Vasilieva, A.N.; Zyryanov, S.M.; Smirnov, Evgeny; Baklanov, Mikhaïl (2011)