Browsing by author "Fischer, P."
Now showing items 1-6 of 6
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Controlling scratching in Cu chemical Journalmechanical planarization
Eusner, T.; Saka, N.; Chun, J.H.; Armini, Silvia; Moinpour, M.; Fischer, P. (2009) -
Crystallization study of thin ZrO2 ALD films on Al203 and on TiN for DRAM MIMCAP applications
Pawlak, Malgorzata; Menou, Nicolas; Wang, Xin Peng; Dilliway, G.; Pierreux, D.; Fischer, P.; Vos, Rita; Hoyer, R.; Kittl, Jorge; Wouters, Dirk; Biesemans, Serge (2008) -
Effect of deposition and anneal temperature on batch-ALD deposited ZrO2/Al2O3/ZrO2 films for DRAM MIM capacitor applications
Dilliway, G.; Pierreux, D.; Fischer, P.; Menou, Nicolas; Pawlak, Malgorzata; Wang, Xin Peng; Wouters, Dirk (2008) -
High aspect ratio via metallization for 3D integration using CVD TiN barrier and electrografted Cu seed
Druais, Gael; Dilliway, Gabriela; Fischer, P.; Guidotti, E.; Bureau, C.; Palmans, Roger; Radisic, Alex (2008) -
High aspect ratio via metallization for 3D integration using CVD TiN barrier and electrografted Cu seed
Druais, Gael; Dilliway, G.; Fischer, P.; Guidotti, E.; Luhn, Ole; Radisic, Alex; Zahraoui, S. (2008) -
High-k dielectrics and metal gates for future generation memory devices
Kittl, Jorge; Opsomer, Karl; Popovici, Mihaela Ioana; Menou, Nicolas; Kaczer, Ben; Wang, Xin Peng; Adelmann, Christoph; Pawlak, Malgorzata; Tomida, Kazuyuki; Rothschild, Aude; Govoreanu, Bogdan; Degraeve, Robin; Schaekers, Marc; Zahid, Mohammed; Delabie, Annelies; Meersschaut, Johan; Polspoel, W.; Clima, Sergiu; Pourtois, Geoffrey; Knaepen, W.; Detavernier, C.; Afanasiev, Valeri; Blomberg, T.; Pierreux, Dieter; Swerts, Johan; Fischer, P.; Maes, Jan; Manger, D.; Vandervorst, Wilfried; Conard, Thierry; Franquet, Alexis; Favia, Paola; Bender, Hugo; Brijs, Bert; Van Elshocht, Sven; Jurczak, Gosia; Van Houdt, Jan; Wouters, Dirk (2009)