Browsing by author "Pierloot, Kristine"
Now showing items 1-6 of 6
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Aluminium oxide atomic layer deposition on semiconductor substrates
Delabie, Annelies; Sioncke, Sonja; Rip, Jens; Van Elshocht, Sven; Pourtois, Geoffrey; Mueller, Matthias; Beckhoff, Burkhard; Pierloot, Kristine (2011) -
Atomic layer deposition of Ruthenium: a theoretical insight
Phung, Quan; Pourtois, Geoffrey; Swerts, Johan; Pierloot, Kristine; Delabie, Annelies (2014) -
Chemisorption reaction mechanisms for atomic layer deposition of high-k oxides on high mobility channel materials
Delabie, Annelies; Sioncke, Sonja; Van Elshocht, Sven; Caymax, Matty; Pourtois, Geoffrey; Pierloot, Kristine (2010) -
Chemisorption reaction mechanisms for atomic layer deposition of high-k oxides on high mobility channels
Delabie, Annelies; Sioncke, Sonja; Van Elshocht, Sven; Caymax, Matty; Pourtois, Geoffrey; Pierloot, Kristine (2010) -
Mechanisms for the trimethylaluminum reaction in aluminum oxide atomic layer deposition on sulfur passivated germanium
Delabie, Annelies; Sioncke, Sonja; Rip, Jens; Van Elshocht, Sven; Caymax, Matty; Pourtois, Geoffrey; Pierloot, Kristine (2011) -
Reaction mechanisms for atomic layer deposition of aluminum oxide on semiconductor substrates
Delabie, Annelies; Sioncke, Sonja; Rip, Jens; Van Elshocht, Sven; Pourtois, Geoffrey; Mueller, Matthias; Beckhoff, Burkhard; Pierloot, Kristine (2012)