Browsing by author "Li, H."
Now showing items 1-12 of 12
-
Analog radio-over-fiber transceivers based on III-V-on-silicon photonics
Van Gasse, Kasper; Bogaert, Laurens; Breyne, Laurens; Van Kerrebrouck, Joris; Dhoore, Soren; Op de Beeck, Camiel; Katumba, Andrew; Wu, Chia-Yi; Li, H.; Verbist, Jochem; Rahim, Abdul; Moeneclaey, Bart; Wang, Zheng; Chen, H.; Van Campenhout, Joris; Yin, Xin; Kuyken, Bart; Morthier, Geert; Bauwelinck, Johan; Torfs, Guy; Roelkens, Gunther (2018-11) -
Analyses of post metal etch cleaning in downstream H2O-based plasma followed by a wet chemistry
Li, H.; Baklanov, Mikhaïl; Boullart, Werner; Conard, Thierry; Brijs, Bert; Maex, Karen; Froyen, L. (1999) -
Characterisation of tungsten nitride barrier layer for copper metallisation
Jin, S.; Li, H.; Bender, Hugo; Heyvaert, Ilse; Maex, Karen (1999) -
Characterization and barrier properties for Cu metallization of tungsten nitride deposited by PECVD using WF6+N2+H2
Li, H.; Heyvaert, Ilse; Jin, S.; Lanckmans, Filip; Bender, Hugo; Maex, Karen; Froyen, L. (1998) -
Characterization of ultra thin layers by Rutherford backscattering spectrometry
Brijs, Bert; Deleu, Jeroen; Conard, Thierry; Li, H.; Loo, Roger; Caymax, Matty; Nakajima, K.; Kimura, K.; Vandervorst, Wilfried (1999) -
Chemical and electrical characterization of the interaction of BCl 3/Cl2 etching and CF4/H2O stripping plasmas with aluminum surfaces
Proost, Joris; Li, H.; Conard, Thierry; Boullart, Werner; Maex, Karen (1999) -
Distinct expression and methylation patterns for genes with different fates following a single whole-genome duplication in flowering plant
Shi, T.; Rahmani, R.S.; Gugger, P.F.; Wang, M.; Li, H.; Zhang, Y.; Li, Z.; Wang, Q.; Van de Peer, Y.; Marchal, Kathleen; Chen, J. (2020) -
Effect of Cu on Al interfacial mass transport in bamboo rie and damscene (AlCu)
Proost, Joris; Li, H.; Witvrouw, Ann; Maex, Karen (1999) -
Evaluation of post metal etch cleaning by analyzing chemical compositions and distributions
Li, H.; Baklanov, Mikhaïl; Boullart, Werner; Conard, Thierry; Brijs, Bert; Maex, Karen; Froyen, L. (1998) -
Evaluation of post metal etch cleaning by analyzing chemical compositions and distributions
Li, H.; Baklanov, Mikhaïl; Boullart, Werner; Conard, Thierry; Brijs, Bert; Maex, Karen; Froyen, L. (1999) -
Process integration induced thermodesorption from SiO2/SiLK resin dielectric based interconnects
Baklanov, Mikhaïl; Muroyama, M.; Judelewicz, Moshe; Kondoh, Eiichi; Li, H.; Waeterloos, Joost; Vanhaelemeersch, Serge; Maex, Karen (1999) -
Thermal desorption issues related to silicidation and back-end metallization
Li, H.; Vereecke, Guy; Schaekers, Marc; Baklanov, Mikhaïl; Sleeckx, Erik; Maex, Karen; Froyen, L. (1999)