Browsing by author "Smirnov, Evgeny"
Now showing items 1-8 of 8
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Evaluation of a new advanced low-k material
Smirnov, Evgeny; Vanstreels, Kris; Verdonck, Patrick; Ciofi, Ivan; Shamiryan, Denis; Baklanov, Mikhaïl; Phillips, Mark (2011) -
First evaluation of new advanced SOG 2.0 low-k material
Smirnov, Evgeny; Vanstreels, Kris; Verdonck, Patrick; Shamiryan, Denis; Baklanov, Mikhaïl; Phillips, Mark (2010) -
Impact of plasma exposure on organic low-k materials
Smirnov, Evgeny; Ferchichi, Abdelkarim; Huffman, Craig; Baklanov, Mikhaïl (2010) -
Plasma damage and restoration of CVD low-k materials
Smirnov, Evgeny; Ferchichi, Abdelkarim; Zhao, Larry; Baklanov, Mikhaïl (2009) -
Plasma sealing of advanced organic low-k material
Smirnov, Evgeny; Pantouvaki, Marianna; Huffman, Craig; Vanstreels, Kris; Baklanov, Mikhaïl (2011) -
The effect of He plasma treatment on properties of organosilicate glass low-k films
Braginsky, O.V.; Kovalev, A.S.; Lopaev, D.V.; Malykhin, E.M.; Mankelevich, Y.A.; Proshina, O.V.; Rakhimova, T.V.; Rakhimov, A.T.; Voloshin, D.G.; Vasilieva, A.N.; Zyryanov, S.M.; Smirnov, Evgeny; Baklanov, Mikhaïl (2011) -
Ultra low dielectric constant materials for 22 nm technology node and beyond
Baklanov, Mikhaïl; Smirnov, Evgeny; Zhao, Larry (2011) -
Ultra low dielectric constant materials for 22 nm technology node and beyond
Baklanov, Mikhaïl; Smirnov, Evgeny; Zhao, Larry (2011)