Browsing by author "Park, Jin-Goo"
Now showing items 1-14 of 14
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Acidic cleaning solutions for post InGaAs CMP cleaning
Park, Jin-Goo; Purushothaman, Muthukrishnan; Lee, Jung-Hwan; Choi, In-chan; Kim, Hyun-Tae; Teugels, Lieve; Kim, Tae-Gon (2018-04) -
Analyzing the collapse force determined using lateral force AFM using
Wostyn, Kurt; Kim, Tae-Gon; Park, Jin-Goo; Mertens, Paul (2008) -
Analyzing the collapse force determined using lateral force AFM using mechanics theory
Wostyn, Kurt; Kim, Tae-Gon; Park, Jin-Goo; Mertens, Paul (2008) -
Analyzing the collapse force of narrow lines measured by lateral force AFM using an analytical mechanical model
Wostyn, Kurt; Kim, Tae-Gon; Mertens, Paul; Park, Jin-Goo (2009) -
Collapse behavior and forces of multistack nanolines
Kim, Tae-Gon; Wostyn, Kurt; Mertens, Paul; Busnaina, Ahmed A.; Park, Jin-Goo (2010) -
Development of post InGaAs CMP cleaning process for sub 10 nm device application
Purushothaman, Muthukrishnan; Choi, In-chan; Kim, Hyun-Tae; Teugels, Lieve; Kim, Tae-Gon; Park, Jin-Goo (2017-10) -
Development of post InGaAs CMP cleaning process for sub 10nm device application
Purushothaman, Muthukrishnan; Choi, In-Chan; Kim, Hyun-Tae; Teugels, Lieve; Kim, Tae-Gon; Park, Jin-Goo (2017-10) -
Effect of ammonium halide salts on wet chemical nanoscale etching and polishing of InGaAs surfaces for advanced CMOS devices
Samanta, Suprakash; Jin, Seungwan; Lee, Chan-Hee; Lee, Seong-Soo; Struyf, Herbert; Kim, Tae-Gon; Park, Jin-Goo (2023) -
Effects of H2O2 and pH on the Chemical Mechanical Planarization of Molybdenum
Ryu, Heon-Yul; Teugels, Lieve; Devriendt, Katia; Struyf, Herbert; Kim, Tae-Gon; Park, Jin-Goo (2021) -
Effects of interfacial strength and dimension of structures on physical cleaning window
Kim, Tae-Gon; Pacco, Antoine; Wostyn, Kurt; Xu, XiuMei; Struyf, Herbert; Arstila, Kai; Park, Jin-Goo; De Gendt, Stefan; Mertens, Paul; Heyns, Marc (2010) -
Investigation of physical cleaning process window by atomic force microscope
Kim, Tae-Gon; Wostyn, Kurt; Bearda, Twan; Park, Jin-Goo; Mertens, Paul; Heyns, Marc (2009-10) -
Pattern collapse and particle removal forces of interest to semiconductor fabrication process
Kim, Tae-Gon; Wostyn, Kurt; Park, Jin-Goo; Mertens, Paul; Busnaina, Ahmed (2009) -
Quantitative measurement of pattern collapse and particle removal force
Kim, Tae-Gon; Wostyn, Kurt; Mertens, Paul; Busnaina, Ahmed; Park, Jin-Goo (2007) -
Tackling the challenges of physical cleaning
Wostyn, Kurt; Janssens, Tom; Zijlstra, Aaldert; Wada, Masayuki; Andreas, Michael; Kim, Tae-Gon; Bearda, Twan; Leunissen, Peter; Park, Jin-Goo; Mertens, Paul (2008)