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Effect of ammonium halide salts on wet chemical nanoscale etching and polishing of InGaAs surfaces for advanced CMOS devices
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Authors
Samanta, Suprakash
;
Jin, Seungwan
;
Lee, Chan-Hee
;
Lee, Seong-Soo
;
Struyf, Herbert
;
Kim, Tae-Gon
;
Park, Jin-Goo
DOI
10.1016/j.mssp.2023.107469
ISSN
1369-8001
Issue
July
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume
161
Title
Effect of ammonium halide salts on wet chemical nanoscale etching and polishing of InGaAs surfaces for advanced CMOS devices
Publication type
Journal article
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2
20.500.12860/42256.2
*
2023-11-06T10:58:43Z
validation by library/open access desk
1
20.500.12860/42256
2023-08-02T17:18:15Z
*Selected version
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