Browsing by author "Kim, Tae-Gon"
Now showing items 1-20 of 42
-
Acidic cleaning solutions for post InGaAs CMP cleaning
Park, Jin-Goo; Purushothaman, Muthukrishnan; Lee, Jung-Hwan; Choi, In-chan; Kim, Hyun-Tae; Teugels, Lieve; Kim, Tae-Gon (2018-04) -
Acoustic cleaning in nano-electronics
Mertens, Paul; Janssens, Tom; Holsteyns, Frank; Zijlstra, Aaldert; Halder, Sandip; Wostyn, Kurt; Andreas, Michael; Hoyer, Ronald; Barbagini, Francesca; Wada, Masayuki; Franklin, Cole; Kim, Tae-Gon; Kim, K; Kenis, Karine; Le, Quoc Toan; Claes, Martine; Kesters, Els; Vos, Rita; Vereecke, Guy; Bearda, Twan; Heyns, Marc (2008) -
Analyzing the collapse force determined using lateral force AFM using
Wostyn, Kurt; Kim, Tae-Gon; Park, Jin-Goo; Mertens, Paul (2008) -
Analyzing the collapse force determined using lateral force AFM using mechanics theory
Wostyn, Kurt; Kim, Tae-Gon; Park, Jin-Goo; Mertens, Paul (2008) -
Analyzing the collapse force of narrow lines measured by lateral force AFM using an analytical mechanical model
Wostyn, Kurt; Kim, Tae-Gon; Mertens, Paul; Park, Jin-Goo (2009) -
Atomic resolution quality control for Fin oxide recess by atomic resolution profiler
Kim, Tae-Gon; Ryu, Heon-Yul; Kenis, Karine; Jo, Ah-jin; Cho, Sang-Joon; Park, Sang-il; Schmidt, Sebastian; Irmer, Bernd (2016) -
Challenges and novel approaches for photo resist removal and post-etch residue removal for 22 nm interconnects
Mertens, Paul; Kim, Tae-Gon; Claes, Martine; Le, Quoc Toan; Vereecke, Guy; Kesters, Els; Suhard, Samuel; Pacco, Antoine; Lux, Marcel; Kenis, Karine; Urbanowicz, Adam; Tokei, Zsolt; Beyer, Gerald (2009) -
Characterization of low-k dielectric etch residue on the sidewall by chemical force microscope
Kim, Tae-Gon; Le, Quoc Toan; Suhard, Samuel; Lux, Marcel; Vereecke, Guy; Claes, Martine; Struyf, Herbert; De Gendt, Stefan; Mertens, Paul; Heyns, Marc (2010) -
Characterization of metal permeation in porous low-k films by spectroscopic ellipsometry
Kim, Tae-Gon; Verdonck, Patrick; Ciofi, Ivan; Barbarin, Yohan; Tokei, Zsolt; Baklanov, Mikhaïl (2013) -
Collapse behavior and forces of multistack nanolines
Kim, Tae-Gon; Wostyn, Kurt; Mertens, Paul; Busnaina, Ahmed A.; Park, Jin-Goo (2010) -
Collapse behavior and forces of multistack patterns
Kim, Tae-Gon; Wostyn, Kurt; Mertens, Paul; Busnaina, Ahmed; Park, Jin Goo (2008) -
Development of post InGaAs CMP cleaning process for sub 10 nm device application
Purushothaman, Muthukrishnan; Choi, In-chan; Kim, Hyun-Tae; Teugels, Lieve; Kim, Tae-Gon; Park, Jin-Goo (2017-10) -
Development of post InGaAs CMP cleaning process for sub 10nm device application
Purushothaman, Muthukrishnan; Choi, In-Chan; Kim, Hyun-Tae; Teugels, Lieve; Kim, Tae-Gon; Park, Jin-Goo (2017-10) -
Effect of ammonium halide salts on wet chemical nanoscale etching and polishing of InGaAs surfaces for advanced CMOS devices
Samanta, Suprakash; Jin, Seungwan; Lee, Chan-Hee; Lee, Seong-Soo; Struyf, Herbert; Kim, Tae-Gon; Park, Jin-Goo (2023) -
Effects of H2O2 and pH on the Chemical Mechanical Planarization of Molybdenum
Ryu, Heon-Yul; Teugels, Lieve; Devriendt, Katia; Struyf, Herbert; Kim, Tae-Gon; Park, Jin-Goo (2021) -
Effects of interfacial strength and dimension of structures on physical cleaning window
Kim, Tae-Gon; Pacco, Antoine; Wostyn, Kurt; Xu, XiuMei; Struyf, Herbert; Arstila, Kai; Park, Jin-Goo; De Gendt, Stefan; Mertens, Paul; Heyns, Marc (2010) -
Estimation of the adhesion strength of particles/residues and gate structures for calculating the damage threshold of patterned silicon wafers during physical force assisted cleans
Halder, Sandip; Kim, Tae-Gon; Vos, Rita; Kenis, Karine; Claes, Martine; De Gendt, Stefan; Mertens, Paul (2010) -
In-line 3D AFM for critical dimension and sidewall roughness of Si photonic waveguide and correlation with its propagation loss
Kim, Tae-Gon; Verheyen, Peter; De Heyn, Peter; Vandeweyer, Tom; Miller, Andy; Pantouvaki, Marianna; Van Campenhout, Joris; Jo, Ahjin; Cho, Sangjoon; Park, Sang-il (2017) -
In-line atomic resolution local nanotopography variation metrology for CMP process
Kim, Tae-Gon; Heylen, Nancy; Kim, Soon-Wook; Vandeweyer, Tom; Jo, Ah-jin; Lee, Ju Suk; Ahn, Byoung-Woon; Cho, Sang-Joon; Park, Sang-il; Imer, Bernd; Shmidt, Sebastian (2017)