Browsing by author "Marrant, Koen"
Now showing items 1-6 of 6
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Dielectric reliability of 70 nm pitch air-gap interconnect structures
Pantouvaki, Marianna; Sebaai, Farid; Kellens, Kristof; Goossens, Danny; Vereecke, Bart; Versluijs, Janko; Van Besien, Els; Caluwaerts, Rudy; Marrant, Koen; Bender, Hugo; Moussa, Alain; Struyf, Herbert; Beyer, Gerald (2011) -
Dual beam FIB/SEM cross-section imaging of nano-structures
Bender, Hugo; Drijbooms, Chris; Van Marcke, Patricia; Geypen, Jef; Marrant, Koen (2007) -
Metrology for implanted Si substrate and dopant loss studies
Radisic, Dunja; Shamiryan, Denis; Mannaert, Geert; Boullart, Werner; Rosseel, Erik; Bogdanowicz, Janusz; Goossens, Jozefien; Marrant, Koen; Bender, Hugo; Sonnemans, Roger; Berry, Ivan (2009) -
Metrology for implanted Si substrate and dopant loss studies
Radisic, Dunja; Shamiryan, Denis; Mannaert, Geert; Boullart, Werner; Rosseel, Erik; Bogdanowicz, Janusz; Goossens, Jozefien; Marrant, Koen; Bender, Hugo (2009) -
Metrology for implanted Si substrate loss studies
Radisic, Dunja; Shamiryan, Denis; Mannaert, Geert; Boullart, Werner; Rosseel, Erik; Bogdanowicz, Janusz; Goossens, Jozefien; Marrant, Koen; Bender, Hugo; Sonnemans, Roger; Berry, Ivan (2010) -
TEM analysis in semiconductor industry: R&D examples of future needs
Richard, Olivier; Geypen, Jef; Favia, Paola; Verleysen, Eveline; Marrant, Koen; Van Marcke, Patricia; Bender, Hugo (2010)