Browsing by author "Meynen, Herman"
Now showing items 21-27 of 27
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Properties of porous HSQ-based films capped by plasma enhanced chemical vapor deposition dielectric layers
Iacopi, Francesca; Baklanov, Mikhaïl; Sleeckx, Erik; Conrad, T.; Bender, Hugo; Meynen, Herman; Maex, Karen (2002) -
Reduction of the premetal dielectric thermal budget for a 0.35 μm technology
Waeterloos, Joost; Meynen, Herman; de Potter de ten Broeck, Muriel; Coenegrachts, Bart; Gao, Teng; Grillaert, Joost; Van den hove, Luc; Maex, Karen (1996) -
Studies on XLK film characterization and integration in copper damascene processes
Iacopi, Francesca; Alves Donaton, Ricardo; Coenegrachts, Bart; Komiya, Takayuki; Struyf, Herbert; Lepage, Muriel; Van Aelst, Joke; Boullart, Werner; De Roest, David; Vos, Ingrid; Baklanov, Mikhaïl; Vereecke, Guy; Van Hove, Marleen; Stucchi, Michele; Tokei, Zsolt; Meynen, Herman; Bremmer, J. N.; Vanhaelemeersch, Serge; Maex, Karen (2001) -
Study of the integration of a new elastomeric material in a silicone under the bump configuration
Vanden Bulcke, Mathieu; Gonzalez, Mario; Winters, Christophe; Beyne, Eric; Meynen, Herman; Gardner, Geoff; Harkness, Brian (2004) -
The evaluation and the inegration of low-k organic spin-on materials in a non-etchback interconnect process
Meynen, Herman; Waeterloos, Joost; Coenegrachts, Bart; Gao, Teng; Grillaert, Joost; Van den hove, Luc (1996) -
The integration of a low-k material with high organic content in a non-etchback process
Waeterloos, Joost; Meynen, Herman; Coenegrachts, Bart; Vanhaelemeersch, Serge; Grillaert, Joost; Van den hove, Luc (1996) -
Ultra low stress and low temperature patternable silicone materials for applications within microelectronics
Meynen, Herman; Vanden Bulcke, Mathieu; Gonzalez, Mario; Harkness, Brian; Gardner, Geoff; Sudbury-Holtschlag, Joan; Vandevelde, Bart; Winters, Christophe; Beyne, Eric (2004)