Browsing by author "Truffert, Vincent"
Now showing items 21-28 of 28
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Patterning developments in spin-on hard mask systems for 30nm half pitch EUV technology
Truffert, Vincent; Pollentier, Ivan; Foubert, Philippe; Lazzarino, Frederic; Wilson, Chris; Ercken, Monique; Gronheid, Roel; Demuynck, Steven; Buch, Xavier; Anno, Yusuke (2012) -
Patterning of 25nm contact holes at 90nm pitch: combination of L/S double exposure immersion lithography and plasma-assisted shrink technology
de Marneffe, Jean-Francois; Lazzarino, Frederic; Johansson, Henrik; Truffert, Vincent; Boullart, Werner (2010) -
Patterning of 25nm contact holes at 90nm pitch: combination of line/space double exposure immersion lithography and plasma-assisted shrink technology
de Marneffe, Jean-Francois; Lazzarino, Frederic; Goossens, Danny; Vandervorst, Alain; Richard, Olivier; Shamiryan, Denis; Xu, Kaidong; Truffert, Vincent; Boullart, Werner (2011) -
Printing the contact and metal layers for the 32 and 22 nm node: comparing positive and negative development process
Bekaert, Joost; Van Look, Lieve; Wiaux, Vincent; Truffert, Vincent; Maenhoudt, Mireille; Vandenberghe, Geert; Reybrouck, Mario; Tarutani, S. (2009) -
Process development using negative tone development for the dark field critical layers in a 28 nm node process
Versluijs, Janko; Truffert, Vincent; Murdoch, Gayle; De Bisschop, Peter; Trivkovic, Darko; Wiaux, Vincent; Kunnen, Eddy; Souriau, Laurent; Demuynck, Steven; Ercken, Monique (2012) -
Simulation and measurement of the capacitance benefit of air gap interconnects for advanced technology nodes
Kumaresan, Vishnuvarthan; Wilson, Chris; Verdonck, Patrick; Van Besien, Els; Lazzarino, Frederic; Truffert, Vincent; Boemmels, Juergen; Tokei, Zsolt; Wong, T.K.S. (2014) -
Ultimate contact hole resolution using immersion lithography with line/space imaging
Truffert, Vincent; Bekaert, Joost; Lazzarino, Frederic; Maenhoudt, Mireille; Miller, Andy; Moelants, Myriam; Wu, Timothy (2009) -
Validation of imaging benefits of Dual Monopole exposures
Brunner, Timothy A.; Franke, Joern-Holger; Truffert, Vincent; De Bisschop, Peter; Rispens, Gijsbert; Duriau, Edouard; van Dijk, Andre; Tabery, Cyrus; Rio, David; de Poortere, Etienne; van de Kerkhof, Mark; Hendrickx, Eric (2023)