Browsing by author "Van Hoof, Rita"
Now showing items 41-60 of 65
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Processing and characterisation of poly-SiGe micromachined resonators and comparison with SOI
Claes, Gert; Van Hoof, Rita; Du Bois, Bert; Van Barel, Greg; Stoffels, Steve; Decoutere, Stefaan; Nguyen, V.; Hentz, S.; Robert, P.; Celis, Jean-Pierre; Witvrouw, Ann (2008) -
Reactive ion etching of Pt and Pt-Metal stacks, for mems applications using the DSE systems at Imec
Jamieson, Geraldine; Severi, Simone; Van Hoof, Rita; Du Bois, Bert; Helin, Philippe; Boullart, Werner (2009) -
Residual thermo-mechanical stresses in thinned-chip assemblies
Leseduarte, S.; Marco, S.; Beyne, Eric; Van Hoof, Rita; Marty, A.; Pinel, S.; Vendier, O.; Coello-Vera, A. (1999) -
Residual thermomechanical stresses in thinned-chip assemblies
Leseduarte, S.; Marco, S.; Beyne, Eric; Van Hoof, Rita; Marty, A.; Pinel, S.; Vendier, O.; Coello-Vera, A. (2000) -
SiGe MEMS at processing temperatures below 250C
El Rifai, Joumana; Sedky, Sherif; Van Hoof, Rita; Severi, Simone; Lin, Dennis; Sangameswaran, Sandeep; Puers, Bob; Van Hoof, Chris; Witvrouw, Ann (2012) -
SiGe MEMS technology: a platform technology enabling different demonstrators
Witvrouw, Ann; Van Hoof, Rita; Bryce, George; Du Bois, Bert; Verbist, Agnes; Severi, Simone; Haspeslagh, Luc; Osman, Haris; De Coster, Jeroen; Wen, Lianggong; Puers, Bob; Beernaert, Roel; De Smet, Herbert; Rudra, Sukumar; Van Thourhout, Dries (2010) -
SiGe MEMS technology: a platform technology enabling different demonstrators
Witvrouw, Ann; Van Hoof, Rita; Bryce, George; Du Bois, Bert; Verbist, Agnes; Severi, Simone; Haspeslagh, Luc; Osman, Haris; De Coster, Jeroen; Wen, Lianggong; Puers, Bob; Beernaert, Roel; De Smet, Herbert; Rudra, Sukumar; Van Thourhout, Dries (2010) -
Silicon tip formation by isotropic SF6/HBr based dry etching
Kunnen, Eddy; Severi, Simone; Verheyen, Peter; Dupont, Tania; Van Hoof, Rita; Vleugels, Frank; Heck, J.; Belov, N.; Decoutere, Stefaan; Boullart, Werner (2009) -
Simultaneous optimization of the material properties, uniformity and deposition rate of polycrystalline CVD And PECVD silicon-germanium layers for MEMS applications
Bryce, George; Severi, Simone; Du Bois, Bert; Willegems, Myriam; Claes, Gert; Van Hoof, Rita; Haspeslagh, Luc; Decoutere, Stefaan; Witvrouw, Ann (2008) -
Simultaneous optimization of the material properties, uniformity and deposition rate of polycrystalline CVD And PECVD silicon-germanium layers for MEMS applications
Bryce, George; Severi, Simone; Du Bois, Bert; Willegems, Myriam; Claes, Gert; Van Hoof, Rita; Haspeslagh, Luc; Decoutere, Stefaan; Witvrouw, Ann (2008) -
Stacked boron doped poly-crystalline silicon-germanium layers: an excellent MEMS structural layer
Claes, Gert; Van Barel, Greg; Van Hoof, Rita; Du Bois, Bert; Gromova, Maria; Verbist, Agnes; Van der Donck, Tom; Decoutere, Stefaan; Celis, Jean-Pierre; Witvrouw, Ann (2008) -
Static and dynamic characterization of poly-SiGe grating light valves
Rudra, Sukumar; Van Thourhout, Dries; Witvrouw, Ann; De Coster, Jeroen; Van Hoof, Rita (2011) -
Static and dynamic characterization of pull-in protected CMOS compatible poly-SiGe grating light valves
Rudra, Sukumar; De Coster, Jeroen; Van Hoof, Rita; Bryce, George; Severi, Simone; Witvrouw, Ann; Van Thourhout, Dries (2012) -
Temporary 0-level MEMS packaging using a heat decomposable sealing ring
Bogaerts, Lieve; Phommahaxay, Alain; Gerets, Carine; Jaenen, Patrick; Van Hoof, Rita; Severi, Simone; De Coster, Jeroen; Soussan, Philippe; Witvrouw, Ann; Beernaert, Roel; Rudra, Sukumar (2011) -
Temporary protective packaging for optical MEMS
Bogaerts, Lieve; Phommahaxay, Alain; Gerets, Carine; Jaenen, Patrick; Van Hoof, Rita; Severi, Simone; Van De Peer, Myriam; De Coster, Jeroen; La Manna, Antonio; Soussan, Philippe; Witvrouw, Ann (2011) -
The use of BCB and photo-BCB dielectrics for high speed digital and microwave applications
Beyne, Eric; Van Hoof, Rita; Achen, A. (1995) -
Thermal management in a new ultra-thin chip stack technology
Pinel, S.; Tasselli, J.; Bailbe, J. P.; Marty, A.; Marco, S.; Morante, J. R.; Beyne, Eric; Van Hoof, Rita; Vendier, O.; Huan, M. (2001) -
Thermal modeling and management in ultrathin chip stack technology
Pinel, S.; Marty, A.; Tasselli, J.; Bailbe, J. P.; Beyne, Eric; Van Hoof, Rita; Marco, S.; Morante, J. R.; Vendier, O.; Huan, M. (2002) -
Thin film polymer layers for molded smart cards, CIMID technology
Beyne, Eric; Van Hoof, Rita; Christiaens, Filip; Roggen, Jean; Van Puymbroeck, Jan; Heermann, M.; Gouwy, G. (1994) -
Ultra thin chip vertical integration technique
Pinel, S.; Tasselli, J.; Lepinois, F.; Marty, A.; Bailbe, J. P.; Beyne, Eric; Van Hoof, Rita; Marco, S.; Morante, J. R. (2001)