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Toward the 5nm technology: layout optimization and performance benchmark for logic/SRAMs using lateral and vertical GAA FETs

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2573 since deposited on 2021-10-23
1last month
Acq. date: 2026-03-18

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2573 since deposited on 2021-10-23
1last month
Acq. date: 2026-03-18

Citations