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Toward the 5nm technology: layout optimization and performance benchmark for logic/SRAMs using lateral and vertical GAA FETs

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2575 since deposited on 2021-10-23
2last month
Acq. date: 2026-05-17

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Views

2575 since deposited on 2021-10-23
2last month
Acq. date: 2026-05-17

Citations