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ALD growth behavior of high-k nanolayers on various substrates characterized by X-Ray Spectrometry in gracing incidence geometry
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Acq. date: 2026-01-25
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1 since deposited on 2021-10-21
Acq. date: 2026-01-25
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1910 since deposited on 2021-10-21
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Acq. date: 2026-01-25
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