Publication:

Thin film characterization of PEALD Ru layers on an ALD WNC substrate

Date

2007
Proceedings Paper
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Author(s)

Volders, Henny  
;
Tokei, Zsolt  
;
Sinapi, Fabrice
;
Bender, Hugo  
;
Benedetti, Alessandro
;
Brijs, Bert
;
Conard, Thierry  
;
Franquet, Alexis  
;
Steenbergen, Johnny  
;
Travaly, Youssef
;
Sprey, Hessel  
;
Li, Wei-Min
;
Shimizu, Akira
;
Park, Hyung Sang

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Abstract

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1974 since deposited on 2021-10-16
Acq. date: 2026-06-06

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1974 since deposited on 2021-10-16
Acq. date: 2026-06-06

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