Publication:
Triangular-shaped RF MEMS switched air gap capacitor in imec's SiGe-MEMS platform
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
1864 since deposited on 2021-10-21
2last month
1last week
Acq. date: 2026-07-21
Citations
Statistics
Views
1864 since deposited on 2021-10-21
2last month
1last week
Acq. date: 2026-07-21
Citations