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The role of hydrogen peroxide in the SC2 clean
Publication:
The role of hydrogen peroxide in the SC2 clean
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Date
1994
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hurd, Trace
;
Mertens, Paul
;
Schmidt, Harald
;
Ditter, D.
;
Hall, L. H.
;
Meuris, Marc
;
Heyns, Marc
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2097
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Acq. date: 2025-12-11
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Views
2097
since deposited on 2021-09-29
10
last month
3
last week
Acq. date: 2025-12-11
Citations