Publication:
Exploration of BEOL line-space patterning options at 12nm half-pitch and below
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2168 since deposited on 2021-10-25
18last month
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Acq. date: 2026-10-13
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Statistics
Views
2168 since deposited on 2021-10-25
18last month
6last week
Acq. date: 2026-10-13
Citations