Publication:
Exploration of BEOL line-space patterning options at 12nm half-pitch and below
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2085 since deposited on 2021-10-25
8last month
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Acq. date: 2025-12-16
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2085 since deposited on 2021-10-25
8last month
1last week
Acq. date: 2025-12-16
Citations