Publication:

CMOS compatible anodization process for low cost high density capacitors

Date

2010

Proceedings Paper

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Files

21203.pdf 488.33 KB

Author(s)

Detalle, Mikael

;

Rakowski, Michal

;

Potoms, Goedele

;

Mercha, Abdelkarim

;

de Potter de ten Broeck, Muriel

;

Phommahaxay, Alain

;

Sabuncuoglu Tezcan, Deniz

;

Soussan, Philippe

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