Publication:

Exploring the readiness of EUV photo materials for patterning

Date

2017

Proceedings Paper

https://doi.org/10.1117/12.2258220

Simple item page Full metadata Statistics

Files

36976.pdf 2.58 MB

Author(s)

De Simone, Danilo

;

Vesters, Yannick

;

;

Vandenberghe, Geert

;

Foubert, Philippe

;

Beral, Christophe

;

Van Den Heuvel, Dieter

;

;

Lazzarino, Frederic

Statistics

1999 since deposited on 2021-10-24

1last month

1last week

Acq. date: 2026-10-02