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Low-Frequency Noise Characterization of BEOL Metal-Insulator-Metal Capacitors

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dc.contributor.authorGiusi, G.
dc.contributor.authorSaini, Nishant
dc.contributor.authorCroes, K.
dc.contributor.authorCiofi, I.
dc.contributor.authorScandurra, G.
dc.contributor.authorCiofi, C.
dc.contributor.authorTierno, D.
dc.contributor.imecauthorSaini, Nishant
dc.contributor.imecauthorCroes, K.
dc.contributor.imecauthorCiofi, I.
dc.contributor.imecauthorTierno, D.
dc.contributor.orcidimecSaini, Nishant::0000-0002-3807-3761
dc.date.accessioned2025-04-13T04:30:52Z
dc.date.available2025-04-13T04:30:52Z
dc.date.issued2025-APR
dc.description.wosFundingTextThis work was supported by the Next Generation European Union-National Recovery and Resilience Plan (EUNRRP), Mission 4, Component 2, under Grant CUP J53D23016160001. The work of Nishant Saini was supported by the Research Foundation Flanders (FWO), Belgium through the Ph.D. Fellowship-Strategic Basic Research under Grant 1SH0P24N.
dc.identifier.doi10.1109/TED.2025.3542748
dc.identifier.issn0018-9383
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45529
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
dc.source.beginpage1933
dc.source.endpage1938
dc.source.issue4
dc.source.journalIEEE TRANSACTIONS ON ELECTRON DEVICES
dc.source.numberofpages6
dc.source.volume72
dc.subject.keywordsWORK FUNCTION
dc.subject.keywordsGATE ELECTRODE
dc.subject.keywordsCHALLENGES
dc.subject.keywordsFILM
dc.title

Low-Frequency Noise Characterization of BEOL Metal-Insulator-Metal Capacitors

dc.typeJournal article
dspace.entity.typePublication
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