Publication:

Reverse tip sample scanning for precise and high-throughput electrical characterization of advanced nodes

Date

2019
Proceedings Paper
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

44130.pdf 1.06 MB

Author(s)

Celano, Umberto  
;
Hantschel, Thomas  
;
Boehme, Thijs  
;
Kanniainen, A.
;
Wouters, Lennaert  
;
Bender, Hugo  
;
Bosman, Niels
;
Drijbooms, Chris  
;
Folkersma, Steven  
;
Paredis, Kristof  
;
Vandervorst, Wilfried  
;
van der Heide, Paul  

Journal

Abstract

Description

Statistics

Views

2044 since deposited on 2021-10-27
2last month
1last week
Acq. date: 2026-04-27

Citations

Statistics

Views

2044 since deposited on 2021-10-27
2last month
1last week
Acq. date: 2026-04-27

Citations