Publication:

Use of grazing emission XRF for silicon wafer surface contamination measurements

Date

1996
Proceedings Paper
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Author(s)

De Gendt, Stefan  
;
Kenis, Karine  
;
Mertens, Paul  
;
Heyns, Marc  
;
Claes, M.
;
Van Grieken, R. E.
;
Bailleul, A.
;
Knotter, Martin
;
De Bokx, P. K.

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1998 since deposited on 2021-09-29
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1998 since deposited on 2021-09-29
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Acq. date: 2026-04-05

Citations