Publication:

The effect of He plasma treatment on properties of organosilicate glass low-k films

Date

2011
Journal article
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

21818.pdf 804.95 KB

Author(s)

Braginsky, O.V.
;
Kovalev, A.S.
;
Lopaev, D.V.
;
Malykhin, E.M.
;
Mankelevich, Y.A.
;
Proshina, O.V.
;
Rakhimova, T.V.
;
Rakhimov, A.T.
;
Voloshin, D.G.
;
Vasilieva, A.N.
;
Zyryanov, S.M.
;
Smirnov, Evgeny
;
Baklanov, Mikhaïl

Journal

Journal of Applied Physics

Abstract

Description

Statistics

Views

1914 since deposited on 2021-10-19
2last month
2last week
Acq. date: 2026-02-28

Citations

Statistics

Views

1914 since deposited on 2021-10-19
2last month
2last week
Acq. date: 2026-02-28

Citations