Publication:

Physical characterization of mixed HfAlOx layers by complementary analysis techniques

Date

2004
Journal article
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Author(s)

Bender, Hugo  
;
Conard, Thierry  
;
Richard, Olivier  
;
Brijs, Bert
;
Petry, Jasmine
;
Vandervorst, Wilfried  
;
Defranoux, C.
;
Boher, P.
;
Rochat, N.
;
Wyon, C.
;
Mack, P.
;
Wolstenholme, J.
;
Vitchev, E.
;
Houssiau, L.
;
Pireaux, J-J.
;
Bergmaier, A.
;
Dollinger, G.

Journal

Materials Science and Engineering B

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