Publication:
Cryogenic etching of porous organosilicate low-k materials: fluorine based plasma analysis
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
2006 since deposited on 2021-10-22
3last month
2last week
Acq. date: 2026-10-10
Citations
Statistics
Views
2006 since deposited on 2021-10-22
3last month
2last week
Acq. date: 2026-10-10
Citations