Publication:

Exploring the use of Tungsten-based Hard Masks in BEOL interconnects for 3nm node and beyond

Date

2022
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Author(s)

Montero Alvarez, Daniel  
;
Vega Gonzalez, Victor  
;
Puliyalil, Harinarayanan  
;
Nie, Jiuyuan
;
Yang, Jialing
;
Schleicher, Filip  
;
Mclaughlin, Kevin
;
Versluijs, Janko  
;
Lazzarino, Frederic  
;
Park, Seongho  
;
Tokei, Zsolt  

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Downloads

79 since deposited on 2022-11-23
Acq. date: 2026-08-27

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1678 since deposited on 2022-11-23
71last month
18last week
Acq. date: 2026-08-27

Citations