Publication:
Thickness dependence and annealing behavior of Pt-group metal thin films as alternative metals for advanced interconnects
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1831 since deposited on 2021-10-23
Acq. date: 2025-12-17
Citations
Metrics
Views
1831 since deposited on 2021-10-23
Acq. date: 2025-12-17
Citations